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  6. 193nm high-reflective laser mirror for ArF excimer laser

193nm high-reflective laser mirror for ArF excimer laser

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last updated:Jan 16, 2025

サンインスツルメント 本社
サンインスツルメント 本社
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Achieved a reflectance of ">98% at 193nm" with IBS coating! Protects the optical system from UV lasers and extends its lifespan.

We offer the "193nm High Reflective Laser Mirror" for ArF excimer lasers developed by Optoman. Achieving a reflectivity of ">98% @193nm" with IBS coating. To realize high reflectivity in the ultraviolet wavelength range, it is essential to effectively control scattering and absorption losses. For UV laser users, mirror degradation is a significant issue. The manufacturer has focused on surface quality and optimized coating technology. This technology protects the optical system from UV lasers and extends its lifespan. 【Product Specifications】 ■ Material: UVFS (Corning 7980 0F) ■ Diameter: 25.4mm +0/-0.1mm ■ Thickness: 6.35mm +/-0.1mm ■ Effective Diameter: 22mm ■ Surface Accuracy S1: <λ/10@633nm over any 15mm diameter *For more details, please download the PDF (English version) or feel free to contact us.

    mirror
193nm高反射レーザーミラー.PNG

193nm high-reflective laser mirror for ArF excimer laser

193nm高反射レーザーミラー.PNG
193nm高反射レーザーミラー.PNG
  • Related Link - https://www.sun-ins.com/pickup/193nm/
  • Special site - Product/service details - https://pr.mono.ipros.com/sun-ins/product/

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【IBS Coating】 ■S1: HRa > 98% @ 193nm, AOI = 45deg ■S2: Uncoated *For more details, please download the PDF (English version) or feel free to contact us.

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High Reflective Mirror for ArF Excimer Laser - 193nm

High Reflective Mirror for ArF Excimer Laser - 193nm

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[English Version] High Reflective Mirror for ArF Excimer Laser - 193nm 2

[English Version] High Reflective Mirror for ArF Excimer Laser - 193nm 2

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サンインスツルメント

サンインスツルメント 本社

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San-In Instrument Co., Ltd. imports and sells optical communication and laser products utilizing advanced technology as an agent from various countries around the world. ■ Laser oscillators (femtosecond lasers/picosecond lasers/nanosecond lasers/CW lasers/wavelength-tunable lasers/narrow linewidth lasers, etc.) ■ Optical communication equipment (transceivers/optical amplifiers/WDM/couplers, etc.) ■ Sensing-related (various optical detectors) ■ Spectroscopy-related (spectrometers/optical fiber probes/hyperspectral cameras, etc.) ■ Optical systems (IBS-coated optical systems/super high vacuum windows/retroreflectors, etc.)

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