A new PVD device proposed by a company that knows Endura inside and out.
TRIBUS SYSTEM is a subsidiary of Semicat, a company specializing in the refurbishment of EnduraⓇ PVD systems manufactured by Applied Materials. The company was established in 2020 and has been manufacturing and selling its uniquely developed PVD system (SURPASS P200Ⓡ) since 2021, based on the knowledge and experience gained at Semicat. Compared to conventional PVD systems, it offers improved throughput and software operability and flexibility, leading to accelerated adoption by companies in major semiconductor manufacturing countries.
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basic information
<Product Features> ✓ Easy visualization of processing status through a uniquely designed GUI ✓ Each process chamber is equipped with a PLC, allowing management of dozens of parameters *Standard Endura chambers and process kits can be installed ✓ No software licensing fees, enabling cost reduction ✓ Equipped with Auto Wafer Centering (AWC) to detect misalignment and incorrect transport during transfer to the chamber ✓ Optional installation of Two Dual Blade Robots contributes to improved throughput ✓ Comes with process guarantees *Installation of high-speed thick film Al chamber (optional) is possible
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Applications/Examples of results
Metalization with Ti/TiN and Al, etc.
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Company information
Hakuto Co., Ltd. is a trading company specializing in electronics and providing technical services as a technology trading company and a manufacturer of chemical industrial products, creating a rich future where people and technology coexist by identifying individual needs. Our company was established in November 1953 as a trading company engaged in the import and sale of quartz crystals. The name "Hakuto" is derived from the first character of "Brazil," the origin of quartz, and "Tokyo," representing the east. This name embodies our strong desire to grow as an international trading company that connects not only Brazil and Tokyo but also the wider world. 【Manufacturers/Products Listed on Ipros】 Asahi Kasei / Sensors, Hall elements, ICs Crystal IS / UVC (Deep Ultraviolet) LEDs IMPINJ / RAIN RFID devices, systems, software