[Analysis Case] Composition and Impurity Analysis of Thin Films, Bulk, and Powder Materials
Quantitative analysis of main components and metallic impurity elements in IGZO using CP-MS.
IGZO thin films, which are transparent oxide semiconductors, are being researched and developed as TFT materials for displays. IGZO is a material whose properties change based on the composition of the thin film and the amount of impurities within it, making it important to obtain information about the composition and impurities. This time, we will introduce a case where the main components and the amounts of metallic impurity elements in IGZO powder, the raw material for the thin film, were evaluated with high precision using ICP-MS. Analysis is possible not only for powders but also for bulk and thin films.
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basic information
Measurement method: ICP-MS Product field: Oxide semiconductors Analysis purpose: Composition evaluation, identification, trace concentration assessment
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Applications/Examples of results
Analysis of oxide semiconductors.
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Company information
MST is a foundation that provides contract analysis services. We possess various analytical instruments such as TEM, SIMS, and XRD to meet your analysis needs. Our knowledgeable sales representatives will propose appropriate analysis plans. We are also available for consultations at your company, of course. We have obtained ISO 9001 and ISO 27001 certifications. Please feel free to consult us for product development, identifying causes of defects, and patent investigations! MST will guide you to solutions for your "troubles"!