8-inch electric XY stage dual-sided microscope system

We measure the positional deviation of the front and back with a repeatability accuracy of ±0.3μm or less!

The "TOMOS-50/60/80/XY" is a dual-sided microscope displacement measurement system capable of simultaneous imaging of both sides, dimensional measurement, and displacement measurement. It features electric control and automatic measurement, making it suitable for measuring and observing displacement of dual-sided exposure patterns, semiconductor wafers, and 4-inch, 6-inch, and 8-inch wafers, as well as MEMS and quartz oscillators. The correction of the optical axis for both sides is performed with high precision using a micro-stage and software. Additionally, it can be sold as a dual-sided microscope module for integration into devices. 【Features】 ■ Simultaneous imaging, dimensional measurement, and displacement measurement of both sides ■ High-precision correction of the optical axis for both sides using a micro-stage and software ■ Measurement of displacement between both sides with a repeatability accuracy of ±0.3μm or less ■ Compatible with a dual-channel auto-focus unit for both sides (optional) ■ Development of an electric XY stage control system is underway ■ Available for sale as a dual-sided microscope module for device integration *For more details, please download the catalog or feel free to contact us.

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