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  6. Analysis of amine impurities in clean room atmosphere

Analysis of amine impurities in clean room atmosphere

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last updated:Jun 23, 2025

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Analyze a humidifier containing propanol by gas chromatography using a WAX column!

I would like to introduce the analysis of amine impurities in clean room atmosphere. In the fabrication of semiconductors and MEMS devices, gaseous impurities in the clean room atmosphere have become a problem due to their adverse effects. In particular, basic impurities such as ammonia and amines are known to cause shape abnormalities in chemically amplified resists. We will report on the analysis method for the amine compound 2-amino-2-methyl-1-propanol (isobutanol amine) using Sylph. For more details, please refer to the PDF document. We encourage you to take a look. [Overview] ■ Analysis by Sylph - Humidifiers containing 2-amino-2-methyl-1-propanol were introduced into a gas bag, and analysis was conducted using a WAX column. *For more details, please download the PDF or feel free to contact us.

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アミン類不純物分析.png

Analysis of amine impurities in clean room atmosphere

アミン類不純物分析.png
アミン類不純物分析.png
  • Related Link - https://www.ballwave.jp/

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Analysis of amine impurities in clean room atmosphere

Analysis of amine impurities in clean room atmosphere

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Ballwave Inc. is engaged in the development, manufacturing, and sales of sensors, as well as the manufacturing, sales, and import/export of systems using sensors, and contracted research, development, and consulting related to sensors. We offer products such as ultra-micro moisture meters and ultra-compact real-time trace moisture meters. Please feel free to contact us if you have any inquiries.

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