APIX δQ & APIX Quattro Gas Analyzer
Thermo Scientific
Continuous bulk gas analysis ensures the purity standards required for QA/QC in semiconductor manufacturing processes.
The APIX δQ and APIX Quattro gas analyzers utilize atmospheric pressure ionization mass spectrometry (API-MS) to connect to one or multiple ultra-high purity (UHP) gas pipelines, enabling immediate and continuous analysis. In the API-MS technology, sample gases are ionized in a reaction chamber maintained at atmospheric pressure, and both positive and negative ions are detected with high precision by the mass spectrometer. This process maximizes ionization efficiency while reducing background noise, resulting in exceptionally high detection sensitivity. This system can identify trace impurities at levels of 10 to 50 ppt, making it ideal for continuous monitoring of UHP gases in fields that require stringent quality control, such as semiconductor manufacturing. Additionally, it offers superior flexibility compared to chromatography, allowing for the immediate measurement of a wide variety of impurities, including moisture, oxygen, carbon dioxide, carbon monoxide, and methane.
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basic information
- Analysis time: <1 second (per component) - Bulk gas compatibility: H2, N2, Ar, He (O2 for dB model as well) - Detection noise: 100MHz (pulse counting type) - Hertz 100MHz (pulse counting type) - Monitored impurities: HO2, CO, CO2, H2O, O2, CH2, Kr, Xe (other impurities also available) - Ion source background: <1ppt - Measurement method: APIMS dB: triple filter x 1, APIMS Quattro: triple filter x 4 - Continuous connection: RS232 Serial Port - Detection limit: <10ppt (varies by component) - Detector type: pulse counting channel electron multiplier - Ion source type: atmospheric pressure ionization
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Applications/Examples of results
Monitoring of ultra-high purity gases in QA/QC of semiconductor manufacturing processes Recommended targets: UHP Nitrogen UHP Argon UHP Helium UHP Hydrogen
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Company information
Thermo Fisher Scientific K.K., the Japanese subsidiary of Thermo Fisher Scientific Incorporated, is a sales company for comprehensive system analysis instruments, bio-related equipment, and research reagents. In Japan, it has bases in Yokohama, Tokyo, Osaka, Fukuoka, and Nagoya, handling various analytical instruments including mass spectrometers, various bio-related equipment, measuring instruments, medical devices, lab software, and research reagents.