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  6. Ultrasonic Sound Pressure Sensor "PT-VM02" for Semiconductor Cleaning Tanks

Ultrasonic Sound Pressure Sensor "PT-VM02" for Semiconductor Cleaning Tanks

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last updated:Nov 12, 2025

プレテック 静岡製作所
プレテック 静岡製作所
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Visualizing cavitation intensity and aging degradation numerically! Accurately measuring the condition of the cleaning tank to support stable operation of the equipment.

The Sonic Checker (PT-VM02) is an ultrasonic sound pressure sensor suitable for the maintenance, inspection, and aging deterioration management of cleaning tanks for semiconductor cleaning equipment and parts cleaning. Despite being the lightest handheld type that can be held with one hand, it supports a wide frequency range from 20 kHz to 8 MHz. It prevents cross-contamination in semiconductor cleaning tanks and employs a unique detection algorithm that enables the detection of fine ultrasonic energy, which was difficult with conventional detectors. 【Main Applications】 ■ Daily management and aging deterioration management of cleaning tanks ■ Performance comparison of cleaning equipment ■ Evaluation of cavitation intensity *For more details, please download the PDF or feel free to contact us. *We also have demo units available for you to check the usability.

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Ultrasonic Sound Pressure Sensor "PT-VM02" for Semiconductor Cleaning Tanks

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  • Related Link - https://www.pre-tech.co.jp/
  • Special site - Product/service details - https://pr.mono.ipros.com/pre-tech/product/

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• The lightest handheld amplifier that is portable • High visibility with a 7-segment LED display • Capable of quantifying ultrasonic intensity in liquid from 20 kHz to 8 MHz • Equipped with an auto-range function for detection values • Can be connected to a PC for easy data recording and analysis • For relative evaluation: Uses a quartz rod sensor to prevent contamination of the cleaning tank. It can be used as a monitoring and aging management tool for the cleaning tank. *For more details, please download the PDF or feel free to contact us.*

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【Purpose】 ■Quantitative measurement of ultrasonic sound pressure in liquid in the high frequency range of 20kHz to 8MHz *For more details, please download the PDF or feel free to contact us.

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プレテック 静岡製作所

プレテック 静岡製作所

Industrial Electrical Equipment

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Our company develops, designs, manufactures, and sells various equipment tailored to customer applications and manufacturing lines in the semiconductor, photomask, disk, and lens industries. We specialize in customized production based on customer specifications, providing total support for the product lifecycle from design, development, assembly, inspection, installation, to maintenance. By building close relationships with customers at every stage, we can directly sense the issues and technological trends they perceive, allowing us to quickly initiate development in response.

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