FOUP Analyzer

It can achieve high sensitivity detection for all AMC categories.

- Unmatched sensitivity - Extensive coverage of AMC at pptv levels - Unmatched measurement speed - Measurement time ~30 seconds/FOUP - Integrated high-speed FOUP handling solution to minimize delays between processes - High-throughput sampling of FOUP for AMC quantitative analysis - Comprehensive provision of AMC status with sampling within 30 seconds for each FOUP (see figure below) - Determination of suitability or unsuitability for FOUP subsequent processing based on the concentration of detected AMC - High reproducibility with variations of less than 20% for measurements on specific FOUP samples - PFAS detection from FOUP - Real-time monitoring of PFAS emissions from FOUP - High-precision measurement of PFAS at low pptv or ppq levels - Responding to strengthened environmental regulations on PFAS requires new AMC detection capabilities

Semiconductor inspection/test equipment