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  6. High-Temperature Compatible Diaphragm Valve for Semiconductors

High-Temperature Compatible Diaphragm Valve for Semiconductors

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last updated:Jan 09, 2026

KITZ SCT Corporation Tokyo Headoffice
KITZ SCT Corporation Tokyo Headoffice
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Diaphragm valve that achieves stable supply even in high-temperature environments.

In semiconductor manufacturing, the supply of chemical solutions requires high purity and temperature control. In particular, the degradation of chemicals and contamination by foreign substances can seriously affect product quality. Additionally, usage in high-temperature environments significantly impacts the durability and reliability of valves. The high-temperature diaphragm valves, 'ZD Series' and 'ZD-K Series,' address these challenges and ensure stable chemical supply. 【Application Scenarios】 - Chemical supply lines - Supply to material containers - Use in high-temperature environments 【Benefits of Implementation】 - Improved maintainability through sheet replacement - Stable performance in high-temperature environments - Maintenance of high product purity

    valve
syu3_w2_small.jpg

High-Temperature Compatible Diaphragm Valve for Semiconductors

syu3_w2_small.jpg
syu3_w2_small.jpg
  • Related Link - https://www.kitzsct.com/contact/product/?utm_sourc…
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basic information

**Features** - Detachable and replaceable sheet section - Usable in high-temperature environments (ZD series: up to 200°C, ZD-K series: up to 250°C) - Sizes: 1/4" 1/2" - Drive method: Automatic Manual (only ZD-K) - Body: SUS316L, SUS316LE (dual melted material), Sheet: PFA, Diaphragm: Cobalt alloy **Our Strengths** KITZ SCT develops, manufactures, and provides sales services for piping components used in semiconductor manufacturing. We have obtained ISO certification and high-pressure gas certification, and we respond to customer needs under a strict quality control system.

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Applications/Examples of results

【Usage】 ■High-purity material container  *Cleanable: Please refer to this if you have been using disposable material containers. *For more details, please refer to the PDF document or feel free to contact us.

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High-Temperature Reusable Diaphragm Valve "ZD Series" "ZD-K Series"

High-Temperature Reusable Diaphragm Valve "ZD Series" "ZD-K Series"

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Proposal for Challenges of High-Temperature Conditions in Solid Material Supply: "Case Studies"

Proposal for Challenges of High-Temperature Conditions in Solid Material Supply: "Case Studies"

TECHNICAL
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High-temperature replaceable valves "ZD/ZD-K Series"

High-temperature replaceable valves "ZD/ZD-K Series"

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Company information

KITZ

KITZ SCT Corporation Tokyo Headoffice

Electronic Components and Semiconductors

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KITZ SCT combines a wide range of technologies, including metal processing and welding techniques, a spacious and clean environment, ultra-precision cleaning systems, and uniquely developed ultra-precision polishing technology, to develop, manufacture, and provide sales services for various piping components used in semiconductor manufacturing, from vacuum to high-pressure systems. Additionally, we incorporate strict quality control systems, including ISO standards and high-pressure gas certification, aiming for comprehensive cleanliness through all analyses and evaluations from material analysis to process/final products, always responding to the needs of the times.

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