Temperature management for semiconductor manufacturing processes! Streamlining with multi-point sensors.
In the semiconductor industry, precise temperature management is essential to improve the quality and yield of manufacturing processes. In particular, in situations such as wafer manufacturing and annealing processes, where subtle temperature changes significantly affect product performance, accurate temperature measurement is required. Uneven temperature distribution can lead to product defects and performance degradation. Multi-point sensors can measure temperatures at up to 20 locations with a single protective tube, helping to efficiently grasp the temperature distribution throughout the process and find optimal conditions. 【Application Scenarios】 - Temperature management in wafer manufacturing processes - Evaluation of temperature uniformity in annealing processes - Temperature monitoring within CVD/PVD equipment - Other semiconductor manufacturing processes where temperature management is critical 【Benefits of Implementation】 - Improved yield through process optimization - Stabilization of product quality - Increased efficiency in temperature management - Reduction of defective products
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basic information
【Features】 - Excellent in thinness, strength, and response, with a wide temperature range. - A single protective tube can measure up to 20 points. - A protective tube with a diameter of 1mm can measure up to 7 points. - Supports usage temperatures up to 600℃ for medium to high temperatures. (Protective tubes with a diameter of Φ1.6 or more comply with JIS Class 3) - The shape of the protective tube can be customized to match the shape of the object being measured. 【Our Strengths】 Kyoto Denraku Co., Ltd. specializes in the design and manufacture of heaters and sensors tailored to customer needs. We provide optimal temperature management solutions for semiconductor manufacturing processes and contribute to solving our customers' challenges.
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Applications/Examples of results
【Applications】 ■ Measurement of temperature distribution inside various types of furnaces and chambers ■ Measurement of temperature distribution inside molds ■ Measurement of temperature distribution of various liquids ■ Liquid side (for low temperature and high temperature) 【Examples of Achievements】 ■ Temperature distribution inside a heat exchange vaporization device for vaporizing liquefied natural gas ■ Temperature distribution of diesel engine exhaust gas treatment filters ■ Temperature distribution during wastewater treatment
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Company information
Kyoto Denratsu Co., Ltd. has been designing and manufacturing various heaters since its establishment in 1991, always prioritizing the trust and confidence of our customers. As a partner in "heating" required for production equipment across all industries, from general industrial machinery to applied equipment, we provide high-quality products at low cost and with speed. In addition to selecting heaters that suit our customers' applications from our extensive range, we also offer the possibility of custom designing and manufacturing from scratch upon request. Based on the experience and achievements we have accumulated, we aim to continue creating various "heating" solutions together with our customers. We appreciate your continued support.