Film Thickness Variation Visualization System | Quantitative Observation of Resist Coating Non-uniformity
Capture the thickness difference with "color." It visualizes the subtle variations and differences in dispensing conditions that arise from the characteristics of viscous fluids with ultra-high sensitivity.
This is an optical system for quantitatively visualizing and managing the non-uniformity of film thickness (film unevenness) in the resist coating process. By using a unique "OAS filter" for thin film enhancement processing, it clearly reveals fine unevenness that is difficult to assess with conventional visual inspection. 【Usage Scenarios】 ■ Daily management and condition setting for resist coaters ■ Quantitative observation of unevenness caused by differences in axle rotation speed or time ■ Quality checks during resist lot changes Since even slight differences in conditions during resist dispensing can be captured in macro images, it supports faster process development and stable operation. *For more details, please refer to the catalog or feel free to contact us. *We are currently accepting requests for evaluations on actual machines. The first sample evaluation will be provided free of charge.
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Smix Corporation is a company specializing in the development, manufacturing, and sales of devices for macro optical inspection. We can perform macro inspections that have a high correlation with CD, capture size variations of 3nm on a macro scale, and visualize the unevenness of mirror-like wafers. By implementing our macro inspection, customers can establish a more efficient and cost-competitive inspection process. Trust us with your macro optical inspection needs.
