Wafer Foreign Object Inspection Module | High-speed detection of 0.1μm at macro level

The night vision optical system does not miss tiny foreign objects. With a unique technology that captures Mie scattered light without resolving, it conducts a complete inspection of 12-inch wafers in just 7 seconds.

This is a macro inspection module specialized for detecting microscopic foreign substances on semiconductor wafers. It dramatically speeds up inspections that typically take a long time due to the narrow field of view of high-resolution cameras, using Sumix's unique "foreign substance inspection dedicated dark field optical system." 【Main Features】 ■ Reliable visualization of microscopic foreign substances (PSL) at the 0.1μm level ■ Identification of foreign substances without relying on resolution through the detection of Mie scattered light ■ Overwhelming tact time, scanning 12-inch wafers in as little as 7 seconds ■ Achievement of high S/N ratio with ultra-low noise line sensor cameras In conventional inspection equipment, it was common knowledge that "increasing sensitivity takes more time," but this module achieves both "high sensitivity and ultra-fast speed." It boasts inspection speeds approximately four times faster than industry-standard machines. *For more details, please refer to the catalog or feel free to contact us. *We are currently accepting requests for evaluations of the actual machine. The first sample evaluation will be provided free of charge.

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