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  6. Thermal Mass Flow Controller/ Meter "SLA5800 Series"

Thermal Mass Flow Controller/ Meter "SLA5800 Series"

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Model SLA5850 / SLA5851 / SLA5853 / SLA5860 / SLA5861 / SLA5863

last updated:Jan 23, 2026

ITWジャパン
ITWジャパン
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Acquisition of certification from the High Pressure Gas Safety Association (KHK). Simplification of the completion inspection procedures by prefectures. Also obtained the type inspection certificate for domestic explosion-proof (JPEx).

The SLA5800 series can handle up to 14 types of pressure and flow with a single unit, achieving high reproducibility and precise control. The thermal mass flow controller/meters "SLA5800 series" support a variety of applications, including research and development related to carbon neutrality, enabling high-precision control and measurement for gases such as hydrogen, methane, LNG, carbon dioxide, and ammonia. Furthermore, the "SLA5850 mass flow controller (normally closed valve)" is certified by the High Pressure Gas Safety Association (KHK), and completion inspections at the prefectural level can be handled simply by submitting the certification. This significantly simplifies the procedures during installation and ensures a smooth equipment startup. *Support for flow meter specifications is also available. 【Features】 ■ Obtained type approval certificate for domestic explosion-proof (JPEx) from DEKRA (Applicable products: mass flow controllers/meters, pressure controllers) ■ Active in fields such as chemicals, petrochemicals, fuel cells, and life sciences ■ Flow range covering a wide spectrum ■ Capable of handling multiple gases and flow ranges with a single unit *For more details, please refer to the catalog. Feel free to contact us with any inquiries.

    Flow MeterFlow ControlSafety Controller
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Thermal Mass Flow Controller/ Meter "SLA5800 Series"

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  • [Official Site] SLA5800 Series
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<Benefits of KHK Certified Products> High-pressure gas equipment requires administrative procedures such as permission applications, inspection applications, and notifications to the governor of the prefecture (or the mayor of the municipality). These administrative procedures involve the preparation of necessary documents and complicated processes such as equipment testing. However, by simply submitting the high-pressure gas equipment test report certificate issued by KHK, the administrative procedures can be completed.

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From research equipment to hydrogen plants: Gas flow control solutions that support the implementation of a hydrogen society.

From research equipment to hydrogen plants: Gas flow control solutions that support the implementation of a hydrogen society.

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Achieving high-precision gas and liquid flow control from research to demonstration and production facilities for CCUS, methanation, and synthetic fuels.

Achieving high-precision gas and liquid flow control from research to demonstration and production facilities for CCUS, methanation, and synthetic fuels.

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[New Products] BCU Series / New Quantim QMC Series (For liquid flow management in environmental, bio, and materials processes)

[New Products] BCU Series / New Quantim QMC Series (For liquid flow management in environmental, bio, and materials processes)

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[New Product] GC Series (Ultra-Compact MEMS Mass Flow Controller)

[New Product] GC Series (Ultra-Compact MEMS Mass Flow Controller)

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GF series (supports multi-gas and multi-range evaluation to high purity and high temperature processes)

GF series (supports multi-gas and multi-range evaluation to high purity and high temperature processes)

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SLA series (supports CCUS, exhaust gas treatment, hydrogen utilization, and thermal treatment processes)

SLA series (supports CCUS, exhaust gas treatment, hydrogen utilization, and thermal treatment processes)

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Thermal Mass Flow Controller / Mass Flow Meter "SLA5800 Series"

Thermal Mass Flow Controller / Mass Flow Meter "SLA5800 Series"

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[Instruction Manual] Thermal Mass Flow 'SLA5800 Series'

[Instruction Manual] Thermal Mass Flow 'SLA5800 Series'

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Mass Flow Controller / Mass Flow Meter "SLAMf Series [NEMA4X/IP66 Standard]"

Mass Flow Controller / Mass Flow Meter "SLAMf Series [NEMA4X/IP66 Standard]"

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Factors Affecting the Performance of MFC in Biopharmaceutical Process Systems【Biotechnology eBook】

Factors Affecting the Performance of MFC in Biopharmaceutical Process Systems【Biotechnology eBook】

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[Certificate of Compliance] Explosion-proof Structure Electrical Machinery and Equipment Type Test (Domestic Explosion-proof: DEK20.0062X)

[Certificate of Compliance] Explosion-proof Structure Electrical Machinery and Equipment Type Test (Domestic Explosion-proof: DEK20.0062X)

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Digital mass flow controller and Ethernet-based network protocol

Digital mass flow controller and Ethernet-based network protocol

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Pressure Controller "SLA/SLAMf Series"

Pressure Controller "SLA/SLAMf Series"

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Gas flow control supports the development of decarbonization and environmental technologies (Brooks Instrument's solutions).

Gas flow control supports the development of decarbonization and environmental technologies (Brooks Instrument's solutions).

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Comprehensive Catalog Product Guide 'flow-pressure-vapor-guide'

Comprehensive Catalog Product Guide 'flow-pressure-vapor-guide'

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Service & Support

Service & Support

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Realizing Precision Control in Energy Innovation (Brooks Instrument Solutions Supporting a Sustainable Future)

Realizing Precision Control in Energy Innovation (Brooks Instrument Solutions Supporting a Sustainable Future)

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EtherNet/IP compatible flow devices for gas and liquid lines to the equipment network.

EtherNet/IP compatible flow devices for gas and liquid lines to the equipment network.

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From hydrogen research to demonstration and production facilities. MFC is chosen based on "equipment conditions."

From hydrogen research to demonstration and production facilities. MFC is chosen based on "equipment conditions."

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From development to mass production, without stopping the process | Achieving optimal gas control with the flexibility of GF40 and the high precision and stability of SLA/SLAMF city lease.

From development to mass production, without stopping the process | Achieving optimal gas control with the flexibility of GF40 and the high precision and stability of SLA/SLAMF city lease.

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ITWジャパン

ITWジャパン

Machine elements and parts

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Our company provides products used in various fields, including heavy industry, oil and gas refining, research in chemistry and petrochemicals, production of pharmaceuticals and biopharmaceuticals, as well as manufacturing equipment for solar cells, LEDs, thin films, optical fibers, and semiconductors. By contributing to the environmental settings that enable process control and accurate measurements, we enhance the precision of our customers' processes, continuously supporting them to maintain their competitiveness while striving for mutual improvement, leading to the development and growth of their businesses. Please feel free to consult us if you have any requests.

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The related categories of Flow Meter

  • Control and Electrical Equipment
  • Safety Equipment
  • Safety Controller
  • Measurement and Analysis
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  • Flow Meter
  • Process Control Equipment
  • Flow Control
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