Suppressing flow rate variation with high-precision extrusion molding of fine-pore ceramics.
In the semiconductor manufacturing industry, uniform supply of chemicals and gases is required to stably provide high-quality products. Particularly in fine pattern formation and precise process control, even slight variations in flow rate can significantly impact product quality. Fine-pore and porous ceramics suppress variations in flow rate values caused by individual units, achieving stable flow supply. 【Usage Scenarios】 - Chemical supply - Gas supply - Film formation process 【Effects of Implementation】 - Stabilization of flow rate - Improved yield - Enhanced quality
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【Features】 - Capable of producing holes from φ0.02mm with a length of 100mm using proprietary technology - Can manufacture deep holes with freely adjustable wall thickness from thin to thick - Contributes to stable flow and pressure loss reduction in fluid control components due to stable inner diameter dimensions - Capable of producing fine holes with an aspect ratio of over 200, even those under 1mm in diameter - High aspect ratio holes are through the extrusion direction 【Our Strengths】 PILOT Fine Ceramics offers unique ceramic products utilizing core technologies such as kneading, extrusion molding, and firing, developed through the experience gained from mechanical pencils. We provide high-density, high-strength, and high-purity ceramics that are precisely molded and uniformly fired thanks to our uniquely developed extrusion molding equipment and firing know-how.
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The above figures are for reference only, so please confirm them with the actual dimensions used in your prototypes.
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PILOT Fine Ceramics is a unique ceramic product that utilizes core technologies such as mixing, extrusion molding, and firing, which we have cultivated through our mechanical pencils. With our uniquely developed extrusion molding equipment and firing know-how, we create high-density, high-strength, and high-purity ceramics that are precisely molded and uniformly fired. Furthermore, by adding secondary processing, we can provide high precision (micron order) dimensional accuracy for inner and outer diameters, as well as surface smoothness (sub-micron order) in surface roughness.
