Supports foreign matter inspection in semiconductor manufacturing. Achieves high-precision measurement.
In the semiconductor industry, detecting foreign matter during the manufacturing process is crucial to ensure product quality. Foreign substances can lead to a decline in product performance and the occurrence of defective products. The dual-sided microscope system 'TOMOS-50' enables simultaneous imaging of both sides of semiconductor components, allowing for the detection of foreign matter with an accuracy of ±0.2μm or less. This enhances quality control in the manufacturing process and contributes to improved yield. 【Application Scenarios】 - Foreign matter inspection of semiconductor wafers - Foreign matter inspection of electronic components - Foreign matter inspection of MEMS devices 【Benefits of Implementation】 - Reduction of defective products due to foreign matter contamination - Increased efficiency in quality control - Improvement in product reliability
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【Features】 - Compact type - Approximately 3 million pixels - Simultaneous capture of both sides, dimension measurement, and positional deviation measurement possible - Front and back optical axis correction is performed with high precision using a micro stage and software - Measures positional deviation of front and back with a repeatability accuracy of ±0.2μm or less (varies by conditions) 【Our Strengths】 We develop, manufacture, and sell professional digital cameras and video-related systems. With new technologies and bold ideas, we provide optimal solutions tailored to our customers' needs.
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【Applications】 ■Observation: Simultaneous observation of the front and back of electronic paper, electrophoresis, particles, fluids, filters, etc. ■Front and back positional deviation measurement: Measurement of positional deviation of inkjet nozzles, quartz oscillators, MEMS, etc. ■Front and back dimensional measurement: Dimensional measurement of quartz oscillators, semiconductor linewidth patterns, etc. *For more details, please refer to the PDF document or feel free to contact us.
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Our company is a comprehensive solution provider for "seeing, viewing, observing, and examining." We handle everything from the development and manufacturing of imaging and optical devices realized through new technologies and bold ideas to system construction. For the development, manufacturing, and sales of professional digital cameras and video-related systems, please leave it to us.
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