Practical Matrix Converter Technology for Semiconductor Manufacturing Equipment

Reduce panel size without the need for power supply countermeasures! Cut off power quality issues at their root and accelerate yield improvement in semiconductor manufacturing.

Our "Practical Matrix Converter Technology" breaks the vicious cycle where power quality affects yield in semiconductor manufacturing equipment. With clean power supply that significantly suppresses harmonics, we are completely liberated from the increasingly serious power quality issues associated with the miniaturization of semiconductor manufacturing equipment, thereby improving yield. By eliminating the need for conventional power filters and other countermeasure equipment, we have significantly reduced the size of the panel. This maximizes the limited space in clean rooms and enhances production efficiency. 【Features】 ■ 75kW practical performance ■ Power factor of 0.98 or higher (measured value) ■ No need for high-frequency countermeasures ■ Compact and lightweight design *For more details, please download the PDF or feel free to contact us.

converterOther semiconductor manufacturing equipment