Air bearing rotating stage for wafer inspection and measurement for semiconductors.
PIglide Air Bearing Rotating Stage A-68x
Slim and high precision. Enhancing the positioning accuracy in semiconductor manufacturing.
In semiconductor manufacturing, high-precision positioning of wafers and photomasks is a crucial factor that affects product quality and yield. Particularly in fine processing and inspection processes, high positioning accuracy and stable operation are required. The A-68x air bearing rotation stage is a high-precision rotating stage that employs air levitation guides. It is less affected by friction or component precision compared to conventional mechanical guides, suppressing stick-slip and frictional heat. This enables high-speed and high-precision rotational positioning. As a result, it contributes to improving the accuracy of inspection, measurement, and alignment in semiconductor manufacturing processes, supporting increased productivity and the production of high-quality devices. 【Application Scenarios】 - Wafer inspection and measurement - Precision positioning of wafers - Photomask alignment - Semiconductor inspection equipment 【Benefits of Implementation】 - Improved yield through high-precision positioning - Increased productivity through high-speed drive - Stable processes due to suppression of frictional heat - Long lifespan and low maintenance due to non-contact structure
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【Features】 - Thin design with a large opening of 260mm and a thickness of 113mm - Frictionless rotation using air bearings - High precision positioning due to high flatness and low eccentricity - Compatible with incremental/absolute encoders 【Our Strengths】 Based on over 50 years of experience from our headquarters in Germany and 30 years of experience from our Japanese subsidiary, we provide piezo stages and actuators adopted by research institutions and equipment manufacturers worldwide, leveraging our precision control technology. With a rich lineup and technical expertise, we propose optimal solutions tailored to our customers' needs.
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- Tomography - Beamline system - Wafer measurement - Wafer inspection - Precision measurement - Inspection equipment - Calibration - Scanning
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The German headquarters, with over 50 years of experience and 30 years as a Japanese corporation, presents new solutions from PI, a company specializing in precision positioning products. We offer the world's number one piezo stages and actuators, as well as hexapod positioning products. Additionally, we are enhancing our lineup of linear motor-driven products and high-precision air bearing stages. In positioning, attention to the foundation is also crucial, and we provide granite bases, enabling us to propose composite systems as well. Please take a look at our diverse lineup that provides cutting-edge technology to production sites around the world, advanced equipment, and various fields of cutting-edge research.
