Inspection equipment for visualizing fine structures for semiconductors.
Mini Focus Micro Focus X-ray DR (Transmission Inspection) System 'TXS-DR150/130f'
Clearly visualize the fine structures inside semiconductors with cutting-edge technology. Strongly support quality control.
In the semiconductor industry, with the miniaturization and high performance of products, the detection of minute internal structural defects and foreign substances has become crucial. In particular, the contamination of fine foreign materials during the manufacturing process and defects at junctions can lead to a decline in product performance or failure. This inspection device addresses these challenges through cutting-edge X-ray technology and high-precision image analysis. 【Application Scenarios】 - Internal structure inspection of semiconductor chips - Foreign substance inspection of wafers - Quality control in packaging - Wire breakage inspection of fine wiring 【Benefits of Implementation】 - Improved yield through early detection of defective products - Enhanced product reliability - Reduction in quality control costs - Gaining trust from customers
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basic information
**Features** - Equipped with a high-resolution, wide-field flat panel detector (can be changed to line sensor) - Extensive imaging area of 350mm × 500mm - Detailed inspection using a variety of image analysis software **Sample Size** Compatible size: Φ200 × H650mm Inspection range (imaging): Φ200 × H550mm *Optional: Φ350 × H500mm Maximum weight: 15Kg (maximum load) **X-ray Source** Maximum tube voltage / focal size / maximum output ◆ TXS-DR150: 150kV micro-focus X-ray source - Minimum focal size 0.3 × 0.3mm, maximum focal size 0.6 × 0.6mm - Maximum output: small focal 210W, large focal 355W ◆ TXS-DR130f: 130kV micro-focus X-ray source - Minimum focal size 12μm, maximum focal size 45μm - Maximum output: small focal 8W, large focal 30W **Fluoroscopy Field** FDP input size: 244 × 307mm (2048 × 2560: 2.5k) Pixel pitch: 120μm Output box: W 1400 × D 1100 × H 1850mm / 2.0 tons / below 2.5μSv/h
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Applications/Examples of results
Transmission of bicycle parts and electronic circuit boards, etc.
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Company information
Our company is an electronic measuring instrument sales agency established in Yokohama in 1967. We handle current and voltage measuring instruments, frequency measuring instruments, noise and vibration measuring instruments, environmental testing machines, infrared thermography, and more, working to solve the challenges of a wide range of customers, including manufacturers of electrical products, automobile manufacturers, universities, and government agencies. Currently, we are supported by many customers at our nine domestic locations in Tokyo, Yokohama, Atsugi, Hamamatsu, Nagoya, Mie, Kyoto, Osaka, and Okayama, as well as two overseas locations.
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