Highly suitable for the electronics and semiconductor industries with ultra-high output! Supports TOC reduction in the ppb order.
The "CX Series" is a super high-output ultraviolet oxidation device that efficiently irradiates vacuum ultraviolet light (184.9 nm) generated from high-output low-pressure mercury lamps to oxidize and decompose organic substances in water. The water used in the semiconductor industry is becoming increasingly pure, and the required values for organic substance (TOC) concentration in ultra-pure water are becoming stricter. This device is suitable for reducing TOC in the ppb range. 【Features】 ■ Low-pressure UV oxidation device ■ Efficiently irradiates vacuum ultraviolet light (184.9 nm) generated from high-output low-pressure mercury lamps ■ Oxidizes and decomposes organic substances in water ■ Well-suited for reducing TOC in the ppb range *For more details, please download the PDF or feel free to contact us.
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basic information
【Specifications (Partial)】 ■Number of lamps: 3, 4, 6, 8, 12, 16, 20, 24, 28, 32, 36, 40 ■Lamp life: 9000 hours of continuous lighting ■Maximum operating pressure: 1MPa ■Input voltage: AC200V±10%, compatible with 50/60Hz ■Material/finish of wetted parts: SUS316L, acid pickled inside and outside ■Startup method: Single action/linked ■Model selection: Model selection is carried out based on TOC concentration and treatment flow rate *For more details, please download the PDF or feel free to contact us.
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Applications/Examples of results
【Applications】 ■Semiconductor industry ■Electronics industry *For more details, please download the PDF or feel free to contact us.
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Company information
Our company recognized the usefulness of ultraviolet sterilization devices early on in Japan and has been dedicated to developing products that meet customer needs for many years since we developed a water ultraviolet sterilization device as a new sterilization method in fields where conventional heating or chemical treatment was not possible. Please feel free to contact us if you have any requests.
