Atmospheric sintering furnace for electrostatic chucks (ESC)

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last updated：Feb 27, 2026

サーモニックENG

Improving the reproducibility of ESC firing and the efficiency of condition setting with a reducing atmosphere of N₂ + H₂ and dew point control.

This is a multi-atmosphere electric furnace specialized for the sintering process of electrostatic chucks (ESC). It supports a high-temperature range of 1600°C (Max 1650°C) and can operate in N₂ and N₂ + H₂ reducing atmospheres. Additionally, it achieves dry/wet switching (optional) through gas humidification by Wetter, enhancing the reproducibility of surface condition adjustments through dew point (pH₂O) control. Since the atmosphere can be switched within the same chamber, it reduces waiting, transportation, and exposure to outside air associated with process segmentation, thereby minimizing the risk of reattachment of particles and moisture. This contributes to reducing the labor required for establishing ESC sintering conditions and stabilizing quality.

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basic information

- Internal dimensions: W 550 × D 550 × H 600 mm - Maximum temperature: Normal use 1600℃ (Max 1650℃) - Atmosphere: N₂, N₂ + H₂ (Dry/Wet switch: Optional) - Processing method: Batch - Heater: W rod heater - Internal material: Ceramic insulation material - Utility: Electricity: AC 380V, 3-phase, 60Hz, 82 kVA - Gas pressure: 0.3 MPa - Cooling water: Approximately 25℃, 0.2 MPa - Safety: H₂ is combusted in an afterburner. Equipped with interlocks for overheating prevention, exhaust system overload protection, pressure monitoring, and shutdown.

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Applications/Examples of results

- Purpose: Sintering of electrostatic chuck (ESC) ceramic parts (debinding/reduction/carbon removal/surface condition adjustment/finishing processes, etc.) - Aim: Improve the reproducibility of sintering conditions related to the material's finish (density, insulation properties, internal electrode condition, etc.) by controlling the N₂ + H₂ reduction atmosphere and Dry/Wet (dew point). - Example of effects: Reduce contamination and variability factors by minimizing transport and exposure to outside air through process and equipment segmentation/reduction of condition-setting man-hours.