AIREX mechanical shaft (screw type) for vacuum environments

No dust in ultra-vacuum.

This is an AIREX mechanical shaft (screw type) that can be used in a vacuum environment. It is optimal as a winding and feeding shaft for solar panels and semiconductor manufacturing equipment. It can be used in ultra-high vacuum areas down to 10^-6 Pa. We use carefully selected materials. The components are made from materials with low gas emission. Metals include SUS303, SUS304, SUS440C, and A2017. Resins include Vespearl SP-1, Ketron PEEK, and Viton fluorine rubber. The lubricant is vacuum grease (Barrierta SUPER IS/V, NOK). It has a structure that suppresses dust generation. To minimize contact dust generation during core attachment and detachment, a roller unit is embedded in the outer diameter of the body. During the expansion and contraction of the lugs, it suppresses dust generation from inside the shaft while preventing component seizure by ensuring that the sliding components are a combination of metal and resin. Residual foreign substances from the components are removed. Before assembly, all components are degreased, cleaned with ultrasonic cleaning, and dried to remove moisture. Assembly is carried out in a clean booth with the utmost care to prevent the attachment of oils, dust, and other contaminants.

roller