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  6. PFA coating for semiconductor manufacturing equipment

PFA coating for semiconductor manufacturing equipment

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Fluoropolymer coating

last updated:Apr 01, 2026

日建塗装工業
日建塗装工業
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High purity and low particle characteristics excellent surface treatment PFA coating

In the semiconductor manufacturing field, strict requirements are demanded not only for chemical resistance but also for low particle generation, non-contamination, and high purity. PFA coatings not only excel in chemical and heat resistance but also form dense and defect-free films, which help suppress the permeation of chemicals and gases, contributing to the reduction of particle generation and ion leaching risks. Due to these characteristics, they are widely used for surface treatment of semiconductor manufacturing equipment and related components. They are particularly noted for their ability to maintain stable performance even in environments that require high reliability. We can also provide proposals for optimal specifications and evaluation tests tailored to applications and usage conditions, so please feel free to contact us for technical consultations and prototype verifications.

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【ふっ素樹脂コーティング】ふっ素樹脂コーティング

PFA coating for semiconductor manufacturing equipment

【ふっ素樹脂コーティング】ふっ素樹脂コーティング PFA.jpg
【ふっ素樹脂コーティング】ふっ素樹脂コーティング PFA.jpg DSC_5698.jpg
  • Related Link - https://nikken-toso.co.jp/fluororesin/
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basic information

PFA (perfluoroalkoxy alkane) is a fluoropolymer improved based on PTFE, featuring excellent non-stick properties, heat resistance, chemical resistance, and electrical characteristics. Its high fluidity during melting allows for the formation of a dense and smooth coating film during application. The high-quality coating film, which has few pinholes and voids, enhances reliability in corrosion resistance and insulation. It can also accommodate thick films, making it suitable for long-term use in chemical and high-temperature environments.

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Applications/Examples of results

- Chemical equipment (tanks, piping, stirring components) - Semiconductor manufacturing equipment parts - Transport components, guide components - Food and packaging equipment 【Effects】 - Improved chemical resistance - Enhanced corrosion resistance - Improved insulation properties - Non-stick and slip properties added - Increased long-term reliability

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Introduction to the features and applications of PFA coating with fluoropolymer resin coating.

Introduction to the features and applications of PFA coating with fluoropolymer resin coating.

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日建塗装工業

日建塗装工業

Manufacturing and processing contract

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Nikken Coating Industry Co., Ltd. has been a specialized manufacturer of functional coatings for contract processing, earning the trust of customers across various industries for 79 years since its founding. We leverage our processing technology to maximize the properties of fluororesins, such as non-stick, lubricity, and chemical resistance, providing high-performance coatings that directly address customer challenges, including "Thermo Pro Release" for thermal welding processes and "NonStick STC" for blades and precision molds. In recent years, in response to movements regarding regulations on fluorinated compounds (PFAS), "PEEK resin," which is gaining attention as a substitute for fluororesins, has become a focus. Nikken Coating Industry commercialized the world's first PEEK resin coating, "PEEKCOAT," in 1999. Based on the solid knowledge and know-how accumulated over more than 20 years, we are further intensifying our research and development efforts to explore the potential of next-generation PEEK coatings! We aim to be recognized as "the go-to for PEEK coatings" and will continue to lead the way. As "the best partner for functional coatings that builds trust through technology," Nikken Coating Industry will continue to contribute to the creation of high-quality, high-performance products.

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