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  6. Precision dispenser pump Excalibur for quarter developers.

Precision dispenser pump Excalibur for quarter developers.

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Excalibur

last updated:Apr 01, 2026

テカンジャパン
テカンジャパン
  • Special site
  • Official site

Tekan's dispensing pump, which has a proven track record in the development of coating equipment that requires high precision and accuracy. It is compact yet designed to be extremely robust.

Fluid control syringe pump that prevents waste of expensive EUV resist. It is optimal for resist droplets under spin coaters and slit coaters. Additionally, it achieves high reproducibility (CV value: 0.05%) while being cost-effective. It allows for easy flow rate control from the start, independent of unstable external pressure and flow controllers. Volume range for a single delivery: 2nl to 5ml Volume adjustment unit: minimum 2nl and above Adjustable flow rate range: 5μl/min to 250ml/min (83nl/sec to 4.16ml/sec) Flow rate adjustment unit: 208nl/min and above (2nl/sec) *Depends on the syringe capacity used Example: When using a 2.5ml syringe Volume adjustment unit: minimum 104nl and above Adjustable flow rate range: 250μl/min to 125ml/min (4.1μl/sec to 2.08ml/sec) Flow rate adjustment unit: 6.24ml/min and above (104nl/sec) Features: Equipped with management functions for discharge volume and flow rate via an encoder, as well as a reporting function to notify errors during abnormal conditions. Easy operation linkage via I/O terminals. Memory function for operating volume. Robust design reduces service costs for embedded devices and contributes to a lower failure rate of the equipment.

    Syringe PumpOther physicochemical equipmentAnalytical Equipment and Devices
キャプチャ.PNG

Precision dispenser pump Excalibur for quarter developers.

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キャプチャ.PNG XC picture1.jpg IPROS09386960607191250954 (1).jpeg
  • XCalibur Product Page
  • Special site - Product/service details - https://pr.mono.ipros.com/tecan_oem/product/

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basic information

===== Overview ===== ★ For the technical specifications of the OEM syringe pump, please download and view the catalog. ===== Features ===== The most popular syringe pump from Tekan in recent years Made from a single aluminum die-cast for high durability and to prevent distortion. 【Compact】 Palm-sized, height 127mm 【High Precision】 Dispensing accuracy 0.05% CV/FS 【Flow Rate】 83nl/second to 4.1 ml/second 【High Resolution】 24,000 Steps 【Programming】 Control programming can be easily done via RS232 or RS485 interface. Packed with convenient features through pre-installed firmware.

Price information

-

Delivery Time

P3

Applications/Examples of results

Clinical testing, water quality testing, food testing, petroleum refining, semiconductor cleaning, pharmaceutical testing, quality control, pharmaceutical production, chemical production.

catalog(35)

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Cavro(R) XCalibur Syringe Pump 【Case Study】

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[Case Study] Example of Utilizing Centris Syringe Pump and OEM Robot Arm in Molecular Interaction Analysis Device

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[Case Study] Utilization of the OmniFlex Liquid Dispensing Robot and XCalibur Pump in the CD Spectrometer Sample Automation Device.

[Case Study] Utilization of the OmniFlex Liquid Dispensing Robot and XCalibur Pump in the CD Spectrometer Sample Automation Device.

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Check embedded syringe pumps and pipette modules for clinical testing on a 3D screen.

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Mini Sample Processor Cavro MSP

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[Case Study] Examples of how to easily build diverse custom systems using the Syringe Pump XLP6000 and the Liquid Dispensing Robot OmniFlex.

[Case Study] Examples of how to easily build diverse custom systems using the Syringe Pump XLP6000 and the Liquid Dispensing Robot OmniFlex.

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Brochure Cavro components,  English version

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Tekan Cavro Component Product Catalog English Version

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Long-lasting syringe pump

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Ideal for semiconductor manufacturing and chemical management: compact, lightweight, high-precision syringe pump XCalibur.

Ideal for semiconductor manufacturing and chemical management: compact, lightweight, high-precision syringe pump XCalibur.

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Ultra-compact lightweight high-performance syringe pump Excalibur

Ultra-compact lightweight high-performance syringe pump Excalibur

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Optimal for precise flow rate control - compact and lightweight high-precision syringe pump XCalibur.

Optimal for precise flow rate control - compact and lightweight high-precision syringe pump XCalibur.

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Compact and lightweight high-precision syringe pump XCalibur

Compact and lightweight high-precision syringe pump XCalibur

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High-precision small and lightweight syringe pump for clinical testing - XCalibur.

High-precision small and lightweight syringe pump for clinical testing - XCalibur.

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Ideal for semiconductor manufacturing equipment, compact and lightweight high-precision syringe pump XCalibur.

Ideal for semiconductor manufacturing equipment, compact and lightweight high-precision syringe pump XCalibur.

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Ideal for plating solution management systems and dilution systems, compact and lightweight high-precision syringe pump XCalibur.

Ideal for plating solution management systems and dilution systems, compact and lightweight high-precision syringe pump XCalibur.

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Optimal for semiconductor manufacturing equipment: compact and lightweight high-precision syringe pump XCalibur.

Optimal for semiconductor manufacturing equipment: compact and lightweight high-precision syringe pump XCalibur.

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Optimal for managing plating solutions for electronic substrates - Ultra-high resolution syringe pump XLP6000

Optimal for managing plating solutions for electronic substrates - Ultra-high resolution syringe pump XLP6000

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Ideal for precise liquid addition of etching solution - Ultra-high resolution syringe pump XLP6000

Ideal for precise liquid addition of etching solution - Ultra-high resolution syringe pump XLP6000

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Add liquid to the spin coater accurately and without waste! Compact and lightweight high-precision syringe pump XCalibur.

Add liquid to the spin coater accurately and without waste! Compact and lightweight high-precision syringe pump XCalibur.

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Ideal for precise management, addition, titration, and dilution of semiconductor manufacturing chemicals - Compact and lightweight high-precision syringe pump XCalibur.

Ideal for precise management, addition, titration, and dilution of semiconductor manufacturing chemicals - Compact and lightweight high-precision syringe pump XCalibur.

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Many successful implementations in reagent manufacturing systems - Compact and lightweight high-precision syringe pump XCalibur.

Many successful implementations in reagent manufacturing systems - Compact and lightweight high-precision syringe pump XCalibur.

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Ultra High Resolution Syringe Pump XLP6000

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High-performance, high-precision embedded piston pump Pulssar PBC

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Pipette Module ADP with Liquid Level Detection for Clinical Testing

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[Case Study] Example of Utilizing ADP Pipette Module in Molecular Diagnostic System Including Microfluidic Channels

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[Case Study] Example of Combining Multi-Axis Robot Arm and ADP Pipette Module

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[Case Study] ADP Pipette Module - Example of Use in Clinical Specimen Sorting and Dispensing Device

[Case Study] ADP Pipette Module - Example of Use in Clinical Specimen Sorting and Dispensing Device

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[Case Study] ADP Pipette Module Next-Generation DNA Sequencer

[Case Study] ADP Pipette Module Next-Generation DNA Sequencer

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[Case Study] Utilization of ADP Pipette Module and XMP Syringe Pump in a New High-Sensitivity Gun Detection System

[Case Study] Utilization of ADP Pipette Module and XMP Syringe Pump in a New High-Sensitivity Gun Detection System

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Numerous implementation achievements in POCT; a high-performance, high-precision embedded piston pump, the Pulsar PBC, is also available in a mini type.

Numerous implementation achievements in POCT; a high-performance, high-precision embedded piston pump, the Pulsar PBC, is also available in a mini type.

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High-performance, high-precision embedded piston pump (mini type also available) Pulsar PBC

High-performance, high-precision embedded piston pump (mini type also available) Pulsar PBC

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New version: Air pressure liquid level detection pipetter ADP Detect

New version: Air pressure liquid level detection pipetter ADP Detect

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[Case Study] Use of ADP Pipette Module and XLP6000 Pump in Genetic Diagnostic System

[Case Study] Use of ADP Pipette Module and XLP6000 Pump in Genetic Diagnostic System

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Cavro Liquid Handling Components Catalog

Cavro Liquid Handling Components Catalog

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News about this product(2)

JACLaS EXPO 2026 Exhibition

  • UPDATE
  • Seminar・Event

◆◇◆ We introduce contract development and manufacturing services for diagnostic and medical devices, as well as precision pumps and robotic arms for OEM purposes. ◆◇◆ Tekan utilizes reliable liquid handling and robotic technology to provide a variety of OEM equipment and components in the fields of clinical testing and life sciences. From optimal equipment concept development for the global market to compliance with regulations in various countries and local services, Tekan leverages its extensive resources to provide support. If you have challenges or goals such as the following, please visit the Tekan booth: - You want to develop or improve preprocessing devices or next-generation devices for your current systems. - You want to launch high-quality in-house preprocessing and automated analysis devices. - You want to achieve development that exceeds market expectations through strategic industrial and UI/UX design.

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JACLaS EXPO 2026 Exhibition

  • Company news

Dates: October 8 (Thursday) to October 10 (Saturday), 2026 Venue: Kobe International Exhibition Hall Tekan Booth: Hall 3 D-29 Tekan utilizes highly reliable liquid handling and robotic technology to provide a variety of OEM equipment and components in the fields of clinical testing and life sciences. From developing optimal equipment concepts for the global market to complying with regulations in various countries and providing local services, Tekan leverages its abundant resources to offer support. If you have challenges or goals such as the following, please visit the Tekan booth: - You want to develop and improve preprocessing devices or next-generation devices for your current systems. - You want to launch high-quality in-house preprocessing and automated analysis devices. - You want to achieve development that exceeds market expectations through strategic industrial and UI/UX design.

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Companynews list (12)

Company information

テカンジャパン

テカンジャパン

Pharmaceuticals and Biotechnology

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Tecan is a company that was established in Switzerland in 1980, specializing in the manufacturing and development of life science research support equipment. With the support of many customers, we were able to celebrate our 30th anniversary in Japan in 2022. Tecan Japan operates two businesses. One is the life sciences business, which delivers Tecan-branded products such as automated pipetting systems and microplate readers to end-users. The other is the partnering business, which provides components and equipment as OEM products for partner companies. Our customers span a wide range of fields, including disease research, drug discovery, biotechnology, clinical testing (such as cancer diagnosis, infectious disease diagnosis, and testing centers), scientific analysis, and robotic surgery. Our mission is to improve people's lives and health. Tecan Japan aims to contribute to global health care innovation from the life sciences industry to clinics by supporting our customers' daily activities.

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