Precision dispenser pump Excalibur for quarter developers.

Tekan's dispensing pump, which has a proven track record in the development of coating equipment that requires high precision and accuracy. It is compact yet designed to be extremely robust.

Fluid control syringe pump that prevents waste of expensive EUV resist. It is optimal for resist droplets under spin coaters and slit coaters. Additionally, it achieves high reproducibility (CV value: 0.05%) while being cost-effective. It allows for easy flow rate control from the start, independent of unstable external pressure and flow controllers. Volume range for a single delivery: 2nl to 5ml Volume adjustment unit: minimum 2nl and above Adjustable flow rate range: 5μl/min to 250ml/min (83nl/sec to 4.16ml/sec) Flow rate adjustment unit: 208nl/min and above (2nl/sec) *Depends on the syringe capacity used Example: When using a 2.5ml syringe Volume adjustment unit: minimum 104nl and above Adjustable flow rate range: 250μl/min to 125ml/min (4.1μl/sec to 2.08ml/sec) Flow rate adjustment unit: 6.24ml/min and above (104nl/sec) Features: Equipped with management functions for discharge volume and flow rate via an encoder, as well as a reporting function to notify errors during abnormal conditions. Easy operation linkage via I/O terminals. Memory function for operating volume. Robust design reduces service costs for embedded devices and contributes to a lower failure rate of the equipment.

Syringe PumpOther physicochemical equipmentAnalytical Equipment and Devices