AGV equipped with collaborative robotic arms for semiconductor manufacturing

Efficiently transporting semiconductor manufacturing wafers with AGVs equipped with collaborative robotic arms.

In the semiconductor manufacturing industry, handling wafers with high precision and safety is essential as miniaturization and high integration progress. In particular, delicate operations to prevent damage to sensitive wafers during transport in clean rooms are critical issues directly linked to the yield of the manufacturing process. To address these challenges and improve productivity amid labor shortages, automated transport solutions capable of meeting these needs are indispensable. The collaborative robot arm-equipped AGV "ΣoneRobo" provides a flexible and high-precision transport solution for these challenges. 【Usage Scenarios】 - Wafer transport within clean rooms - Automated transport between manufacturing lines - Wafer supply and discharge to inspection equipment - Flexible response to layout changes 【Benefits of Implementation】 - Increased productivity through automation of wafer transport - Alleviation of labor shortages and reduction of worker burden - Reduced risk of damage to delicate wafers - Stabilization of the manufacturing process and improvement in quality - Rapid response to changes in factory layout

Transport and handling robotsPicking robot system