Where are low thermal expansion materials used in the semiconductor industry? Techniques for selecting to prevent thermal deformation.
Overcoming the wall of miniaturization: "thermal displacement." Key areas where thermal displacement should be suppressed.
Are you struggling with "thermal displacement" caused by temperature changes during exposure and inspection processes? As equipment becomes more miniaturized, the thermal expansion of conventional materials (cast iron and steel) becomes a critical factor that worsens yield. ■ Low thermal expansion cast iron 'Hino GD Invar' - Low thermal expansion: The thermal deformation amount is about 1/ of that of steel (linear expansion coefficient 1.0–5.0 ppm/°C). It is ideal for precision components that require high dimensional stability. - Near-net shape: Reduces machining range and material loss, lowering costs. - Easy to machine: Unique material properties reduce machining costs and accommodate precision machining. ■ Important areas of application Dry vacuum pumps: Preventing contact between the rotor and casing due to heat. Semiconductor inspection equipment: Precision components such as tester heads, interface rings, and wafer stages. By casting complex precision shapes (near-net shape), we have minimized material loss compared to total cutting, achieving cost reductions of about 30%. Why not solve thermal issues starting from "material selection"? The Hino Group will propose the optimal structure for you. 【For more details, please download the catalog from the link below】
Inquire About This Product
basic information
Hinode Group provides one-stop solutions for your manufacturing challenges from the development stage to mass production through "performance improvement by optimizing materials and structures" and "a consistent production system with diverse materials and processes." 【We solve the following issues】 ● For those considering "vibration reduction," "thermal variation reduction," "high rigidity," and "lightweighting" of equipment: - We offer solutions unique to foundry manufacturers through proprietary materials and structural analysis/topology optimization. - We have a robust 3D printing and prototype inspection system to shorten development time. ● For those struggling with the ordering process and lead times for cast parts: - We accommodate a variety of materials and manufacturing processes, including cast iron, cast steel, aluminum, and special materials. - We provide one-stop service from mold making and prototyping to casting, processing, assembly, and transportation. ● For those considering stable supply of castings: - We have a track record as a top share manufacturer of manhole covers with 100 years of experience. - We have worked with over 350 customers in the industrial machinery sector, including machine tools, industrial robots, automobiles, and semiconductor manufacturing equipment. - Our group structure can handle a wide range from small lots of various types to large lots of thousands of units. - We have a cooperative network of over 400 partner companies both domestically and internationally, capable of accommodating any material and size.
Price range
Delivery Time
Applications/Examples of results
Semiconductor manufacturing equipment and electronic component manufacturing equipment (frames, bases, chambers, vacuum pumps, precision parts made of low thermal expansion cast iron, etc.) Machine tools (beds, columns, beams made of cast iron and mineral casting) Industrial robots (bases, casings, arms) Transport equipment and construction machinery (engines, drive systems, hydraulic parts, undercarriage parts) Shipbuilding and marine equipment (sheaves, casings)
catalog（1）
Download All Catalogs
Company information
Hinode Holdings is a professional casting group comprising experts in cast iron, cast steel, aluminum casting, machining, and logistics. Using the collective strength of our group, we solve challenges across design, development, production, and procurement, such as "weight reduction and vibration suppression of equipment parts," "precision machining," and "complexities in supplier management and ordering." From the development stage of equipment to VA/VE for mass-produced machines, leave it to Hinode. ■ Target Industries Semiconductor and electronic component manufacturing equipment (Frames, bases, chambers, vacuum pumps, precision parts made of low thermal expansion cast iron, etc.) Machine tools (Beds, columns, and beams made of cast iron or mineral casting) Industrial robots (Bases, casings, and arms) Transportation equipment and construction machinery (Engines, drivetrains, hydraulic parts, and undercarriage components) Shipbuilding and marine equipment (Sheaves, casings) ■ Target Processes / Materials Processes: Material development & selection, structural design, prototyping, mass production, machining, assembly, quality control, global procurement, and domestic/international logistics. Materials: Cast iron (FC/FCD), aluminum casting, cast steel, stainless cast steel, low thermal expansion materials, heat-resistant cast steel, wear-resistant materials, mineral casting, and others.
![[For efficient water drainage] 100% water-draining air nozzle](https://image.mono.ipros.com/public/product/image/00f/2001469742/IPROS9319730289540870960.png?w=280&h=280)
