Three Challenges to Address with Vacuum Components in the Semiconductor Industry
Prevent outgassing and fine leaks. This explains how to solve the unique challenges of a vacuum environment through material selection and integrated molding technology, achieving cleanliness and quality stability of the equipment.
Are you struggling with delays in reaching pressure or outgassing in the vacuum chambers and pump components of film formation or etching processes? A unique design is required in a vacuum environment, different from that in the atmosphere. ■ Three Challenges to Address with Vacuum Components Outgassing: Gas released from within or on the surface of materials contaminates the process. Virtual Leak: Gas trapped in gaps from welding or screw joints gradually leaks out, reducing vacuum levels. Cleanability: Fine surface roughness and casting defects (voids) become reservoirs for contaminants. ■ Hinode's Casting Solutions Track Record: We have a proven track record of using aluminum castings such as AC7A in vacuum chambers. Material Optimization: We propose the optimal material based on specifications for surface treatment and other factors. Structural Optimization: By integrating multiple components, we eliminate welding and physically reduce the risk of gas accumulation. Additionally, we optimize thickness and shape through rigidity analysis to suggest lightweight and cost-reducing solutions. Manufacturing Process: Our low-pressure casting process minimizes fine casting defects caused by gas, ensuring vacuum attainment levels and speeds. One-Stop Manufacturing: We provide a one-stop solution from casting to precision machining and distribution. When procuring, first check the "density of the material" and "the presence of joints."
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The Hinode Group provides one-stop solutions for your manufacturing challenges from the development stage to mass production through "performance improvement by optimizing materials and structures" and "a consistent production system with diverse materials and processes." 【We solve the following issues】 ● For those considering "vibration reduction," "thermal variation reduction," "high rigidity," and "lightweighting" in equipment: - We propose solutions unique to foundry manufacturers through proprietary materials and structural analysis/topology optimization. - We also have a robust 3D printing and prototype inspection system to shorten development time. ● For those struggling with the ordering process and lead times for cast parts: - We accommodate a variety of materials and manufacturing processes, including cast iron, cast steel, aluminum, and special materials. - We provide one-stop service from mold making and prototyping to casting, processing, assembly, and transportation. ● For those considering stable supply of castings: - We have a track record as a top share manufacturer of manhole covers with 100 years of experience. - We have worked with over 350 customers in the industrial machinery sector, including machine tools, industrial robots, automobiles, and semiconductor manufacturing equipment. - Our group structure can handle a wide range of needs from small lots of various types to large lots of thousands of units. - We have a cooperative network of over 400 partner companies both domestically and internationally, capable of accommodating any material or size.
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Semiconductor manufacturing equipment and electronic component manufacturing equipment (frames, bases, chambers, vacuum pumps, precision parts made of low thermal expansion cast iron, etc.) Machine tools (beds, columns, beams made of cast iron and mineral casting) Industrial robots (bases, casings, arms) Transport equipment and construction machinery (engines, drive systems, hydraulic parts, undercarriage parts) Shipbuilding and marine equipment (sheaves, casings)
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Hinode Holdings is a professional casting group comprising experts in cast iron, cast steel, aluminum casting, machining, and logistics. Using the collective strength of our group, we solve challenges across design, development, production, and procurement, such as "weight reduction and vibration suppression of equipment parts," "precision machining," and "complexities in supplier management and ordering." From the development stage of equipment to VA/VE for mass-produced machines, leave it to Hinode. ■ Target Industries Semiconductor and electronic component manufacturing equipment (Frames, bases, chambers, vacuum pumps, precision parts made of low thermal expansion cast iron, etc.) Machine tools (Beds, columns, and beams made of cast iron or mineral casting) Industrial robots (Bases, casings, and arms) Transportation equipment and construction machinery (Engines, drivetrains, hydraulic parts, and undercarriage components) Shipbuilding and marine equipment (Sheaves, casings) ■ Target Processes / Materials Processes: Material development & selection, structural design, prototyping, mass production, machining, assembly, quality control, global procurement, and domestic/international logistics. Materials: Cast iron (FC/FCD), aluminum casting, cast steel, stainless cast steel, low thermal expansion materials, heat-resistant cast steel, wear-resistant materials, mineral casting, and others.
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