Causes of Vibration in Equipment for the Semiconductor Industry and Countermeasures | Techniques for Reviewing Materials and Structures
Residual vibrations reduce yield. With mineral casting boasting ten times the damping capacity of cast iron, the stabilization time is dramatically shortened, achieving high precision.
Are you experiencing extended takt times due to "micro-vibrations" that do not settle after high-speed movement during bonding and inspection processes? The instability in positioning accuracy is fundamentally caused not only by a lack of rigidity but also by the low "damping" characteristics of the material itself. ■ Three Factors Causing Residual Vibration - Material: While steel has high rigidity, it has a weak ability to absorb vibration energy, resulting in residual oscillation. - Structure: An imbalance of rigidity and mass in the structure can lead to increased oscillation. ■ Solution: Mineral Casting Using polymer concrete made from resin and aggregates, it possesses an overwhelming vibration damping capacity approximately 10 times that of cast iron (FC250). By adopting it for vibration-sensitive components, the overall damping of the equipment can be improved. The "settling time," during which vibrations stabilize to a certain amplitude, can be reduced by about 60%. ■ Criteria for Re-evaluation 1. High Damping: Use mineral casting for areas where immediate cessation of oscillation is desired. 2. High Rigidity: In cases with space constraints where rigidity must also be maintained, consider a hybrid structure with cast iron. The Hinode Group provides comprehensive support from material development to structural analysis. We propose optimal structures based on the rigidity and vibration analysis of the current structure.
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Hinode Group provides one-stop solutions for your manufacturing challenges from the development stage to mass production through "performance improvement by optimizing materials and structures" and "a consistent production system with diverse materials and processes." 【We solve the following issues】 ● For those considering "vibration reduction," "thermal variation reduction," "high rigidity," and "lightweighting" of equipment: - We propose solutions unique to foundry manufacturers through proprietary materials and structural analysis/topology optimization. - We have a robust system for 3D printing and prototype inspection to shorten development time. ● For those struggling with the ordering process and lead times for cast parts: - We accommodate a variety of materials and manufacturing processes, including cast iron, cast steel, aluminum, and special materials. - We provide a one-stop service from mold making and prototyping to casting, processing, assembly, and transportation. ● For those considering stable supply of castings: - We have a track record as a top share manufacturer of manhole covers with 100 years of experience. - We have worked with over 350 customers in the industrial machinery sector, including machine tools, industrial robots, automobiles, and semiconductor manufacturing equipment. - Our group structure can handle a wide range from small lots of various types to large lots of thousands of units. - We have a cooperative network of over 400 partner companies both domestically and internationally to accommodate any material and size.
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Semiconductor manufacturing equipment and electronic component manufacturing equipment (frames, bases, chambers, vacuum pumps, precision parts made of low thermal expansion cast iron, etc.) Machine tools (beds, columns, beams made of cast iron and mineral casting) Industrial robots (bases, casings, arms) Transport equipment and construction machinery (engines, drive systems, hydraulic parts, undercarriage parts) Shipbuilding and marine equipment (sheaves, casings)
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Hinode Holdings is a professional casting group comprising experts in cast iron, cast steel, aluminum casting, machining, and logistics. Using the collective strength of our group, we solve challenges across design, development, production, and procurement, such as "weight reduction and vibration suppression of equipment parts," "precision machining," and "complexities in supplier management and ordering." From the development stage of equipment to VA/VE for mass-produced machines, leave it to Hinode. ■ Target Industries Semiconductor and electronic component manufacturing equipment (Frames, bases, chambers, vacuum pumps, precision parts made of low thermal expansion cast iron, etc.) Machine tools (Beds, columns, and beams made of cast iron or mineral casting) Industrial robots (Bases, casings, and arms) Transportation equipment and construction machinery (Engines, drivetrains, hydraulic parts, and undercarriage components) Shipbuilding and marine equipment (Sheaves, casings) ■ Target Processes / Materials Processes: Material development & selection, structural design, prototyping, mass production, machining, assembly, quality control, global procurement, and domestic/international logistics. Materials: Cast iron (FC/FCD), aluminum casting, cast steel, stainless cast steel, low thermal expansion materials, heat-resistant cast steel, wear-resistant materials, mineral casting, and others.



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