Application of hydrophobic plasma to nanoimprinting
The gases and liquids such as CF4, H2, C2F6, C3F6, C4F8, CH4, C2H2, and C2H4 are used to coat the surface with plasma to make it hydrophobic. This improves the release properties with molds and prevents damage to fine patterns.
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basic information
Power supply: 200V Carrier gas: Argon Head length: 100~200mm Front and rear sliding stage * A bubbling system is required when using liquids.
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Applications/Examples of results
Improvement of release properties for nanoimprint molds Enhancement of pattern formation in inkjet printers Shape retention of microlenses
Detailed information
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By processing the mold, we improve release properties and prevent damage to the pattern.
Company information
Ito Corporation has pursued a fundamental philosophy since its founding in 1946: "Doing the right thing for our customers, suppliers, and ourselves leads to success in all aspects." As a result, we have grown into a group company engaged in business activities in nine countries and 16 locations, fulfilling the headquarters function of the Ito Group. We are confident that "the ability to communicate with added value" is the greatest strength of the Ito Group. To achieve this, we provide our employees with opportunities to acquire advanced skills, build a network that covers the globe, and continue efforts to establish bases closer to our customers and suppliers for closer communication. The customers of the Ito Group range from small venture companies to large global corporations, but regardless of the size of the company, all our customers share the desire to improve productivity through the use of technology. Realizing this desire is where the Ito Group can demonstrate its capabilities, and we are convinced that the trust we build with our customers and suppliers as a result will lead to mutual further development.
