Resin-made water-sealed vacuum pump provides a clean vacuum environment.
In the semiconductor manufacturing process, it is important to maintain a clean working environment. Our water-sealed vacuum pump "MEA" keeps the working environment clean by adopting a water-sealed design, making it suitable for the suction of gases containing droplets and water vapor. Miura's water-sealed vacuum pump was developed not only with a focus on performance but also with a strong emphasis on ease of use. It features a hygienic resin casing and a stainless steel two-stage impeller inside the pump. The structure is durable, resistant to suction troubles and damage. The lightweight, compact body with a directly connected motor is also effective for space-saving. 【Application Scenarios】 - As a vacuum source for fixing in semiconductor manufacturing - Processes requiring a clean suction environment - Suction of gases containing water vapor or moisture 【Benefits of Implementation】 - Space-saving - Maintenance of a clean working environment
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【Features】 - 20% lighter than cast iron vacuum pumps, eliminating corrosion risks - Excellent corrosion resistance and compact due to direct motor connection - Water-sealed, preventing oil contamination and oil mist generation - Suitable for suction of gases containing water droplets and water vapor - Currently selling resin vacuum pumps ranging from 0.5kW to 3.7kW 【Our Strengths】 The Miura Group leverages the expertise gained from boiler development to support customers in solving challenges in their production facilities. As the best partner for heat, water, and the environment, we provide products based on years of experience and technology, contributing to our customers' energy savings and labor reduction.
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Company information
The Miura Group is composed of a total of 20 companies, including 7 domestic companies centered around our company and 13 overseas companies. We mainly engage in the manufacturing, sales, and maintenance of small-scale once-through boilers, marine boilers, waste heat boilers, water treatment equipment, food machinery, high-pressure steam sterilizers, and chemicals for boilers. The Miura Group promotes the corporate brand "MIURA" globally, aiming to grow further as the best partner company in the world for heat, water, and the environment, with the corporate statement of "The Best Partner for Heat, Water, and the Environment." Additionally, based on our leading market share in the small-scale once-through boiler business, we aim to create safe and useful new products and services in fields centered around energy-efficient utilization technology, water treatment technology, and environmental-related technology, contributing to our customers' energy conservation and labor-saving efforts, as well as the preservation of the global environment, in pursuit of growth as a global company. We strive for transparent and efficient management to maximize corporate value, responding to the expectations and trust of our stakeholders, including shareholders, while aiming for healthy growth and fulfilling our corporate social responsibility.