AGV equipped with collaborative robotic arms for semiconductor manufacturing
ΣoneRobo
Achieving efficiency in semiconductor wafer transportation with AGVs equipped with collaborative robotic arms.
In the semiconductor wafer manufacturing industry, high precision and safety are required for handling wafers as miniaturization and high integration progress. In particular, delicate operations to prevent damage to fragile wafers during transport in clean rooms are critical issues directly linked to the yield of the manufacturing process. To address these challenges and improve productivity amid labor shortages, automated transport solutions capable of meeting these needs are essential. The collaborative robot arm-equipped AGV "ΣoneRobo" provides a flexible and high-precision transport solution for these challenges. 【Usage Scenarios】 - Wafer transport within clean rooms - Automated transport between manufacturing lines - Wafer supply and discharge to inspection equipment - Flexible response to layout changes 【Benefits of Implementation】 - Increased productivity through automation of wafer transport - Alleviation of labor shortages and reduction of worker burden - Reduced risk of damage to delicate wafers - Stabilization of the manufacturing process and improvement of quality - Rapid response to changes in factory layout
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【Features】 - Stable transport through a unique vibration suppression mechanism (outrigger) - High-precision picking and placement using a collaborative robot arm - Recognition of the surrounding environment and safe navigation using stereo cameras - Flexible response to factory layout changes and production line optimization - Free movement paths with a non-tracked AGV 【Our Strengths】 Marble offers advanced problem-solving solutions that are difficult for typical software houses to address, based on the shape processing technology developed through CAD/CAM product development. We provide unique system development for our customers and solutions that meet diverse needs, offering DX solutions that support "monozukuri" (manufacturing). We support our customers' problem-solving across a wide range of business areas, including system integration, consulting, cloud service development, IT infrastructure construction, and various software and hardware development.
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Marble Embedded Product Division provides DX solutions that support "monozukuri" (manufacturing). We are developing solutions that meet customer needs, utilizing drawing processing technology accumulated through CAD/CAM product development, along with a range of software that caters to diverse requirements for unique system development. In addition to further enhancing the functionality of the CADSUPER series of CAD and CAM products, we will continue to launch products targeting new market sectors.
