A new model that meets the thermal processing needs of the expanding advanced semiconductor packaging field!
The "PVHC-31S" is a heat treatment solution designed to accommodate large workpieces and more precise heat treatment environments. Its unique structure, which places the cooling water flow path outside the furnace, eliminates dust sources within the furnace and ensures high temperature distribution performance through an efficient cooling mechanism and a simple air conditioning structure. Rapid cooling while maintaining a low-oxygen atmosphere contributes to quality assurance and reduced process time. 【Features】 ■ Supports heat treatment of large panel-shaped workpieces in the 600×600mm class ■ Achieves both low-oxygen atmosphere and high cleanliness, providing a stable process environment ■ Realizes safe and clean cooling capabilities by placing the water cooler outside the furnace ■ Compatible with automatic transport, process data management, and centralized equipment management ■ Allows for system configurations tailored to applications, including automatic doors and various interfaces and upper-level communication specifications *For more details, please download the PDF or feel free to contact us.
Inquire About This Product
basic information
【Specifications】 ■Internal dimensions: W800×H600×D800mm ■Temperature range: +70℃ to +300℃ ■Temperature rise and fall time: 80℃→300℃/60 minutes, 300℃→80℃/90 minutes ■Residual oxygen concentration: 100ppm or less ■Cleanliness: Class 5 (when temperature is stable) ■Options: Automatic door support, upper-level communication support, GEM communication support, EFEM linkage support *Detailed specifications will be discussed separately. *For more information, please download the PDF or feel free to contact us.
Price range
Delivery Time
Applications/Examples of results
For more details, please download the PDF or feel free to contact us.
catalog（1）
Download All Catalogs
Company information
Espec's environmental creation technology enables the reproduction of various Earth environments. This technology confirms the safety and reliability of various products, technologies, and services that support our daily lives. We offer a range of products, from compact sizes that can fit on a desk to large constant temperature and humidity chambers, as well as cold and heat shock devices for testing the reliability of electronic components. Our company provides comprehensive solutions for environmental testing, starting with proposals for customers' testing plans, selection and provision of testing equipment, and contracted environmental testing and analysis/evaluation. Furthermore, we offer various services, including product maintenance, rental of products, and sales of used products.
![Continuous Rust Prevention Treatment Drying Oven [Case Study Introduction]](https://image.mono.ipros.com/public/product/image/f6f/2001510711/IPROS14686992542349073867.png?w=280&h=280)