Maintain a stable oxygen concentration at a few ppm level throughout the processes of temperature rise, stabilization, and decline!
We would like to introduce our low-oxygen clean oven for semiconductor packaging, the "SCO Series." By placing the cooling water flow path outside the chamber, we have adopted a unique structure that does not retain water inside the chamber. This ensures extremely high safety while reducing installation space and system electrical capacity by 50% compared to conventional models (compared to our own devices). The SCO Series meets the industry's highest levels of temperature control, low oxygen concentration, and high cleanliness required in various thermal processing steps of advanced packaging manufacturing processes. 【Features】 ■ Compatible with large panels of 515×510mm ■ High-precision thermal processing up to 500℃ ■ Achieves low oxygen concentration control below 10ppm ■ Maintains cleanliness class 4 stably ■ Compatible with automatic doors and GEM communication *For more details, please download the PDF or feel free to contact us.
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【Other Features】 ■ Capable of maintaining a maximum cleanliness class of 4 even during temperature rise and fall (optional) ■ Stable maintenance of oxygen concentration at a few ppm level throughout the temperature rise, stabilization, and fall processes Additionally, high-precision oxygen control is achieved using a mass flow controller (optional) ■ A high-performance temperature and oxygen concentration control system allows for setting temperature, time, and concentration for each step (Oxygen concentration control function is optional) ■ Advanced sealing technology minimizes the consumption of the gases used *For more details, please download the PDF or feel free to contact us.
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Espec's environmental creation technology enables the reproduction of various Earth environments. This technology confirms the safety and reliability of various products, technologies, and services that support our daily lives. We offer a range of products, from compact sizes that can fit on a desk to large constant temperature and humidity chambers, as well as cold and heat shock devices for testing the reliability of electronic components. Our company provides comprehensive solutions for environmental testing, starting with proposals for customers' testing plans, selection and provision of testing equipment, and contracted environmental testing and analysis/evaluation. Furthermore, we offer various services, including product maintenance, rental of products, and sales of used products.
