Complete FIB processing, observation, and analysis with just one machine!
Raith's unique liquid metal alloy ion source (LMAIS) is an advanced technology that simultaneously releases multiple ion species. The switching of ion species can be easily and quickly changed through software operation without the need for ion source or aperture replacement. ◆ Heavy element ion species (Ga, Bi, Au, Ge) ✓ Suitable for large area processing and ultra-small area SIMS analysis due to their heavy weight and high sputter yield. ✓ Localized ion implantation of any ion species is possible. ◆ Light element ion species (Li, Si) ✓ Fine processing without Ga contamination or damage. ✓ The Li beam, with the smallest beam diameter, enables high-resolution observation at the nanoscale. ■ Multi-ion focused ion beam (FIB) function ■ Magnetic sector secondary ion mass spectrometry (SIMS) function
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basic information
■Multi-Ion Focused Ion Beam (FIB) Function - Fine pattern formation and nanoscale structure fabrication - Cross-section processing, observation, and 3D reconstruction (switching between heavy and light elements, compatible with FIB alone) - Lithium ion microscopy (SIM) observation * There is also a FIB-SEM-SIMS hybrid system that can be used for FIB process control, such as endpoint detection and cross-sectional analysis. ■Magnetic Sector Secondary Ion Mass Spectrometry (SIMS) Function - High sensitivity (ppm to ppb level) and high mass resolution, enabling analysis of trace substances - Capable of analyzing all elements, including hydrogen and lithium, up to uranium, as well as their isotopes - Supports depth concentration profile analysis using ion beam sputtering - Automatically selects multi-ion beam types (positive ions, negative ions) suitable for the target elements.
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Applications/Examples of results
1. Large-area nanofabrication High-precision laser interferometer stage & pattern generation linkage (Plasmonics, Nano-photonics, waveguides, Meta surfaces, 3D nano materials) 2. Ga-free TEM sample preparation 3. Cross-sectional processing and observation & 3D reconstruction using GaBiLi source 4. Maskless ion implantation Emission structures such as Si vacancies/Ge vacancies in diamond 5. Nanopores, nanochannels 6. SIMS analysis (semiconductor defect analysis, distribution evaluation of Li and Rb in battery electrodes, intracellular cerium distribution)
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Company information
Hakuto Co., Ltd. is a trading company specializing in electronics and providing technical services as a technology trading company and a manufacturer of chemical industrial products, creating a rich future where people and technology coexist by identifying individual needs. Our company was established in November 1953 as a trading company engaged in the import and sale of quartz crystals. The name "Hakuto" is derived from the first character of "Brazil," the origin of quartz, and "Tokyo," representing the east. This name embodies our strong desire to grow as an international trading company that connects not only Brazil and Tokyo but also the wider world. 【Manufacturers/Products Listed on Ipros】 Asahi Kasei / Sensors, Hall elements, ICs Crystal IS / UVC (Deep Ultraviolet) LEDs IMPINJ / RAIN RFID devices, systems, software
