The back pressure in the latter stage can operate at atmospheric pressure! A valve-selectable MFC suitable for flow control in various semiconductor processes.
The "MARU9000s" is a pressure sensor-based MFC that can operate under back pressure conditions at atmospheric pressure. This product allows for the selection of either a front valve type or a rear valve type, enabling appropriate proposals based on the process. It features a design suitable for ultra-fine processing, with the rear valve type being compatible with high flow rate processes, minimizing the impact of pressure fluctuations at the rear, and equipped with a self-diagnosis Level 2 function. The front valve type is suitable for low flow rate processes, reducing the impact of pressure fluctuations at the front while verifying flow data with a self-diagnosis Level 3 function, and enhancing corrosion resistance through the use of materials like Hastelloy. It can be applied to all semiconductor processes. 【Features】 ■ Operates under back pressure conditions at atmospheric pressure ■ Front and rear valves can be selected, with proposals tailored to specific processes ■ Properly designed for ultra-fine processing ■ Equipped with self-diagnosis functions *For more details, please download the PDF or feel free to contact us.
Inquire About This Product
basic information
【Specifications】 ■Flow Range: 5 SCCM to 50 SLM ■Flow Control Range: 0.5 to 100% of Full Scale ■Accuracy: <=±0.05% of Full Scale (0.5% to 10%), <=±0.5% of Set Point (10% to 100%) ■Response Time: <=0.5 Sec ■Reproducibility: <=±0.3% of Set Point ■Material: STS316L VIM VAR & EP (Option: Hastelloy) ■Valve Type: Solenoid & Piezo V/V (N.C) *For more details, please download the PDF or feel free to contact us.
Price range
Delivery Time
Applications/Examples of results
【Applications】 ■Ultrafine processing processes in semiconductor manufacturing equipment such as Dry Etcher, Poly Etcher, and Oxide Etcher ■Gas flow control in all semiconductor processes *For more details, please download the PDF or feel free to contact us.
catalog（1）
Download All Catalogs
Company information
Founded in 1992 with the purpose of "serving the world," we have been importing and selling automatic control devices, which are core components of the factory automation industry, and have continued to grow based on the trust of our customers.
