Responding to diverse development and mass production with unique sensor technology! High-temperature MFC supporting temperature control and mass flow control.
This product is a high-temperature mass flow controller (MFC) that enables diverse precursor-specific development and mass production based on unique sensor technology. It adopts a distinctive structure consisting of a control unit (Room Temperature) and a base unit (High Temperature), supporting high-temperature control up to 170°C. Furthermore, we are also developing products that can handle up to 200°C. We contribute to building a product portfolio based on domestic technology, providing total solutions for mass flow control, high-temperature control, and mixed gas control. Additionally, we operate a PLM system for the development and quality management system. 【Features】 ■ Manufactured based on unique sensor technology ■ Supports high temperatures up to 170°C (products for 200°C are also under development) ■ Composed of a control unit and a base unit ■ Capable of diverse precursor-specific development and mass production ■ Provides mass flow control, high-temperature control, and mixed gas control *For more details, please download the PDF or feel free to contact us.
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basic information
【Specifications】 ■Flow range: 300 SCCM to 50 SLM ■Flow control range: 2 to 100% of Full Scale (D-Net, E-CAT, RS485) ■Operating temperature: 90 degrees / 120 degrees / 150 degrees ■Accuracy: ≦±0.3% of Full Scale (flow ≦ 30%), ≦±1.0% of Set Point (flow > 30%) ■Response time: ≦1.0 Sec ■Reproducibility: ≦±0.2% of Full Scale ■Material: STS316L VIM VAR & EP ■Valve type: Solenoid & Piezo V/V (N.C) *For more details, please download the PDF or feel free to contact us.
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Applications/Examples of results
【Applications and Examples of Achievements】 ■ Control in semiconductors (Memory, Foundry, System LSI) ■ Control in displays (LCD, AMOLED, OLED, LED) ■ Control in energy (Solar Energy, Fuel Cell, Oil Refining) ■ Control in general industries (Chemical, Measurement, Shipbuilding, Steel, Medical) ■ High-temperature control, mass flow control, and delivery of various precursors ■ Mass flow control, high-temperature control, and mixed gas control *For more details, please download the PDF or feel free to contact us.
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Company information
Founded in 1992 with the purpose of "serving the world," we have been importing and selling automatic control devices, which are core components of the factory automation industry, and have continued to grow based on the trust of our customers.
