No oil leakage from the power transmission unit.
Two-stage exhaust system / Backflow prevention mechanism included / Gas ballast mechanism included / Built-in thermal protector / With switch / Input terminal (without cable)
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basic information
- Operating Exhaust Speed 50Hz: 135L/min 60Hz: 162L/min - Achievable Pressure*¹ G.V. Close: 5.0×10⁻¹Pa G.V. Open: 5Pa - Motor Output 550W - Oil Used SMR-100 - Oil Volume 1,000mL - Mass 28kg - Inlet Pipe Diameter KF25mm - Operating Ambient Temperature Range 7–40℃ - Maximum Dimensions 166(W)×470(L)×241.5(H)mm - RoHS Compliant ● *¹ The achievable pressure is measured using a Pirani vacuum gauge. For measurements using a McLeod gauge, the achievable pressure for pumps below 1.3Pa will be one order of magnitude lower. * The power plug and power cord are not included.
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Applications/Examples of results
Analysis machine
Company information
ULVAC's corporate philosophy aims to contribute to the development of industry and science by comprehensively utilizing vacuum technology and its related technologies. ULVAC brings together its unique technologies cultivated through years of research and development and production technology reform to provide "ULVAC Solutions," which integrate equipment, materials, analytical evaluation, and services in a multifaceted manner for flat panel displays, electronic components, semiconductors, and general industrial equipment. Moving forward, we will continue to firmly embrace changes in the times and the needs of our customers, striving to be a top global manufacturer in all cutting-edge fields.






