Suppresses wafer contamination and contact failures caused by siloxane gas! Siloxane content of 5μm or less in fluororubber-based paste sealant "HVF-1"!
The silicone-free paste sealant "HVF-1" has a siloxane content of less than 5μm, which helps to suppress damage caused by siloxane. By preventing "wafer contamination," "contact failure," "corrosion of metal parts," "the generation of foreign substances due to chemical reactions," and "contamination of exposure device lenses" caused by siloxane, it can be used for filling gaps inside clean rooms and sealing joints within semiconductor manufacturing equipment. 【Features】 ■ Resistant to both acids and alkalis ■ Air dries at room temperature ■ Main raw material is fluororubber that does not contain silicone, etc. *Free samples are available. *For more details, please download the PDF or contact us.
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【Applications】 - Sealing of joint surfaces such as piping flanges - Sealing of duct joints - Sealing and repair for chemical etching equipment and semiconductor cleaning equipment - Sealing in situations where siloxane is not suitable, such as in painting, optics, and precision machinery - Alternative sealing materials for sealing and repair purposes in equipment and devices requiring heat resistance and chemical resistance, where silicone materials cannot be used, etc.
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We aim to become a company that pursues innovative solutions, bringing joy to as many customers as possible. To achieve this, all employees, including those who do not directly interact with customers, must always share this "thought," constantly devise new ideas, and apply their wisdom. This is the type of company we aspire to be. For inquiries, please contact us at: 03-3257-7000 (Main)
