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  6. The heating element itself is air-permeable, enabling highly precise temperature control "Air-Permeable Heater Component iCas MCT"

The heating element itself is air-permeable, enabling highly precise temperature control "Air-Permeable Heater Component iCas MCT"

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last updated:Oct 27, 2026

TOMOEGAWA CORPORATION
TOMOEGAWA CORPORATION
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TOMOEGAWA's Air-Permeable Heater Component, iCas MCT, is a heater that utilizes our proprietary Stainless Fiber Sheet as its heating element. This unique structure allows the heating element itself to be air-permeable, enabling effective heating while allowing air to flow directly through the heating element.

[Features] - Features a porous stainless steel fiber sheet with a paper-like structure as the heating element - Delivers precise temperature control and rapid thermal response by heating airflow directly through the heating element - Supports compact and lightweight heater designs - Customizable characteristics to meet individual application requirements [Application] ・Applications requiring high precision and reliability, including semiconductor manufacturing equipment, optical instruments, analytical instruments, medical devices, battery manufacturing equipment, and precision processing equipment his product is designed and customized optimally to meet client's requirements. Please share your requirements with us.

    stainless
HeaterMCT_bannar.jpg

The heating element itself is air-permeable, enabling highly precise temperature control "Air-Permeable Heater Component iCas MCT"

HeaterMCT_bannar.jpg
HeaterMCT_bannar.jpg
  • Related Link - https://www.tomoegawa.co.jp/product/electro/heater…

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・Applications requiring high precision and reliability, including semiconductor manufacturing equipment, optical instruments, analytical instruments, medical devices, battery manufacturing equipment, and precision processing equipment

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The heating element itself is air-permeable, enabling highly precise temperature control "Air-Permeable Heater Component iCas MCT"

The heating element itself is air-permeable, enabling highly precise temperature control "Air-Permeable Heater Component iCas MCT"

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Ventilated heater parts iCas MCT (Tobakawa Corporation)

TOMOEGAWA's breathable heater adopted in Nikon's semiconductor exposure equipment - Achieving precise temperature control -

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The breathable heater component "iCas MCT," developed by Hakusen Corporation, has been adopted in Nikon Corporation's semiconductor exposure equipment. This equipment is scheduled to be sold starting in December 2026. Semiconductor exposure equipment requires technology that can form complex and fine electronic circuit patterns on silicon wafers with high precision while also contributing to improvements in productivity and energy efficiency. Even slight temperature fluctuations can affect pattern accuracy, making high-precision and rapid temperature control in the exposure equipment essential, measured in mK (milliKelvin) units. The breathable heater component "iCas MCT" has been adopted for the first time in semiconductor exposure equipment. The "iCas MCT" is a heater component that uses a paper-like, porous structure made of "stainless steel fiber sheet" as the heating element. By incorporating breathability into the heater component and allowing air to pass vertically through the heating surface, it effectively heats while minimizing thermal capacity, achieving high temperature responsiveness and heating performance. Additionally, it contributes to the miniaturization and lightweight design of components, as well as the high performance of semiconductor exposure equipment.

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TOMOEGAWA

TOMOEGAWA CORPORATION

Electronic Components and Semiconductors

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In June 1914, TOMOEGAWA started its path as a pioneer of industrial specialty paper in Japan, and succeeded in domestic production of “electrical insulating paper and telecommunications paper” to meet the needs of telecommunications industry. In the 1960s, we earned a reputation as a 'Tomoegawa of Specialty Paper' by developing papers for multiple industries, with our strength in integrated production from wood pulp. Since then, TOMOEGAWA has developed "papermaking, coating, adhesive, powder" technologies and expanded its business domains to "highly functional materials." In recent years, with the spread of 5G, advanced driver assistance systems, etc., and the promotion of DX, many electronic parts require control for high voltage, high current, high frequency. TOMOEGAWA has expanded our "iCas" brand products that control "heat, electricity, and electromagnetic waves" to produce various solutions for heat, noise, etc. TOMOEGAWA has also formed “GREEN CHIP” brand, focusing on new products that contribute to the conservation of the natural environment and control of manufacturing and operating environments. In addition, we have changed our company name from TOMOEGAWA Co., Ltd., to TOMOEGAWA CORPORATION on January 1, 2024, in order to clarify the actual situation of our company and aim for sustainable corporate growth.

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