Inline Dissolved Ozone Meter, Microcontroller Type
This is an ultraviolet absorbance photometry instrument that monitors the dissolved ozone concentration in ozone-added pure water used in semiconductor processes and other applications in-line. It accommodates various site environments with pipe diameters ranging from Φ6×4 to 1 inch (please contact us for details due to fittings). The concentration range is from 0 to 10 ppm to 0 to 240 ppm. With a built-in microcontroller, it can stably measure the operation of low-pressure mercury lamps, which have individual variations. Even older equipment can continue to be used by undergoing an overhaul.
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basic information
This is an instrument that monitors the dissolved ozone concentration in ozone-added pure water used in semiconductor processes, using an inline ultraviolet absorbance photometry method. - Pipe diameter: Φ6×4 to 1 inch *Please contact us for details as it depends on the fitting manufacturer. - Concentration range: 0 to 10 ppm to 0 to 240 ppm
Price information
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Delivery Time
※1 to 2 months
Applications/Examples of results
Mainly semiconductor factories
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Company information
Our company manufactures and sells dissolved ozone meters developed under the long-term guidance of Professor Omi from Tohoku University. With the motto of utilizing ideas in cutting-edge fields, we will continue to create products that serve our customers, and we appreciate your support.