Resistance rate / Sheet resistance measuring instrument [NC-10]
Napson Corporation develops, manufactures, and sells various measurement systems for semiconductor wafers and FPD substrates. We respond to all needs related to resistivity/sheet resistance, providing high-precision and high-performance systems by leveraging the latest technology and extensive experience, from specification design to aftercare. We have other products available, so please contact us for more details.
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basic information
Non-contact resistance measuring instrument with easy operation via PC control ◆ Space-saving design with simple operation and data processing using a computer ◆ Non-contact eddy current method allows measurement without causing damage ◆ Exchangeable sensor combination of Middle and High based on measurement range (Low sensor option also available) ◆ Temperature compensation function (for silicon wafers) ● Target wafer sizes: 3 inches to 8 inches, or up to 140mm square (options: 2 inches or 12 inches compatible, square substrates larger than 140mm) (*) For further details, please contact us.
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Applications/Examples of results
Silicon wafers, GaAs epitaxial layers, GaN, GaN, GaP, InP, ITO films, metal films, etc.
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We respond to all needs related to resistivity/sheet resistance, providing high-precision and high-performance systems by leveraging the latest technology and extensive experience, from specification design to aftercare.