Resistance and Thickness Measuring Instrument 【EC-80SCAN】

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EC-80SCAN

last updated：Jul 08, 2008

ナプソン

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Resistance and Thickness Measuring Instrument 【EC-80SCAN】

Napson Co., Ltd. develops, manufactures, and sells various measurement systems for semiconductor wafers and FPD substrates. We respond to all needs related to resistivity/sheet resistance, providing high-precision and high-performance systems by leveraging the latest technology and our extensive experience, from specification design to aftercare. We have other products available, so please contact us for more details.

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【Non-contact resistivity/thickness measurement device capable of scanning measurements along a straight line on the surface】 ◆ Equipped with resistivity and thickness sensors, it can display two types of measurement data at once, making it ideal for measuring solar cell silicon wafers. ◆ In addition to point measurements, it features a 'scan measurement mode' that measures along a straight line on the surface and can display graphs. ◆ The air-floating stage allows for easy handling of wafers. ◆ Measurement data can be saved and sent to a computer as a text file (RS-232C). ◆ Simple measurement condition settings using a jog dial. ● Target wafer sizes: [Circular wafers] 3 inches to 8 inches, [Square wafers] 50 to 156 mm (SQ or PSQ) supported. (Note) For further details, please contact us.