Wafer cassette loader/unloader non-contact robotic hand
The "non-contact end effector" generates negative pressure through the Bernoulli effect by ejecting gas, allowing the wafer to be suspended in a non-contact state in mid-air. This hand is designed to be slim, making it ideal for loading and unloading wafers onto carriers. It is equipped with an exhaust recovery device (patented), allowing it to be used in clean rooms. Additionally, it has a positioning mechanism, enabling the transport of aligned wafers.
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basic information
The "non-contact end effector" generates negative pressure through the Bernoulli effect by ejecting gas, allowing the wafer to be suspended in a non-contact state in mid-air. This hand is designed to be thin, making it ideal for loading and unloading wafers onto carriers. Additionally, it is equipped with an exhaust recovery device (patented), allowing it to be used in clean rooms. It also has a positioning mechanism, enabling the transport of aligned wafers.
Price information
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Applications/Examples of results
Wafer Load/Unload Wafer Cassette Transfer Wafer Transport
Company information
Manufacturing of non-contact transport devices and application devices for wafers, liquid crystal glass substrates, PDPs, ceramics, printed circuit boards, FPC substrates, films, paper, cloth, etc., using our patented non-contact transport device "Float Chuck" based on the vertical gas jet method developed by our company.
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