Precision positioning device: A Z-axis positioning stage with high resolution of 50nm or 100nm, excellent positioning reproducibility, and high position retention after positioning!
This is a high-resolution Z-axis positioning stage equipped with an optical linear scale. It achieves a stroke of either 5mm or 10mm with a resolution of "50nm" (*1) or "100nm" (*2). Thanks to its unique design, it minimizes changes in the tilt of the table surface, which is common in Z-axis systems, and, combined with our in-house developed linear scale and proprietary feedback control circuit, it offers high resolution, excellent positioning repeatability, and position holding capability after positioning. (*1) Combination with feedback stage controller FC-411 (*2) Combination with feedback stage controller FC-111
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basic information
Minimum resolution: 50nm or 100nm Maximum moving speed: 5mm/sec (when using FC-411 or FC-111) Stroke: 5mm or 10mm Compatible controllers: FC-411 or FC-111 ■For more details, please request documentation or download the catalog■
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Applications/Examples of results
The feedback stage system has been used in various fields in recent years. Typical application areas include information and communication, optics, semiconductors, and biotechnology. Examples include: positioning during MEMS inspection, optical system delay stages, and microscope stages.
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Company information
The Sigma Koki Group, under the global brand "OptoSigma," is committed to its mission as a "light solution company" in both domestic and international markets, carrying the spirit of "gratitude," "challenge," and "creation." We will continue to actively expand our business and strive for sustainable growth as one united company. We sincerely ask for your understanding and support for the Sigma Koki Group as we pursue true "manufacturing" in the future.
