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  6. 10nm Feedback Stage FS-1040PX/XY

10nm Feedback Stage FS-1040PX/XY

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FS-1040PX / FS-1040PXY

last updated:Jun 03, 2019

シグマ光機
シグマ光機
  • Official site

[Stroke 40mm] A positioning stage with high resolution of 10nm, excellent positioning repeatability, and high position holding capability!

This is a high-resolution positioning stage with an optical linear encoder built into the center of the stage to minimize detection errors. Thanks to our in-house developed linear encoder and proprietary feedback control circuit, it excels in resolution, positioning repeatability, and position holding capability. When combined with the feedback stage controller FC-511, it can operate with a reading resolution of '10nm' over a '40mm' stroke.

    Other inspection equipment and devicesOther microscopesOther FA equipment
Sigmatech_FS-1040PX.jpg

10nm Feedback Stage FS-1040PX/XY

Sigmatech_FS-1040PX.jpg
Sigmatech_FS-1040PX.jpg
  • Related Link - https://www.global-optosigma.com/jp/

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basic information

Minimum resolution: 10nm Maximum movement speed: 10mm/sec (when using FC-511) Stroke: 40mm Compatible controller: FC-511 ■For details, please request materials or download the catalog■

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Applications/Examples of results

The feedback stage system has been used in various fields in recent years. Typical areas of use include information and communication, optics, semiconductors, and biotechnology. Examples include: positioning of microdevices, optical delay stages for optical systems, and sample stages for various microscopes.

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FS-1040PX Catalog

FS-1040PX Catalog

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10nm Feedback Stage System Catalog

10nm Feedback Stage System Catalog

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Feedback Stage System Comprehensive Catalog (Atmosphere/Vacuum) 5th Edition

Feedback Stage System Comprehensive Catalog (Atmosphere/Vacuum) 5th Edition

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Precision Positioning Stage 'Q&A You Should Know When Selecting'

Precision Positioning Stage 'Q&A You Should Know When Selecting'

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シグマ光機

シグマ光機

Testing, Analysis and Measurement

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The Sigma Koki Group, under the global brand "OptoSigma," is committed to its mission as a "light solution company" in both domestic and international markets, carrying the spirit of "gratitude," "challenge," and "creation." We will continue to actively expand our business and strive for sustainable growth as one united company. We sincerely ask for your understanding and support for the Sigma Koki Group as we pursue true "manufacturing" in the future.

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