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  6. Thermal ALD (Atomic Layer Deposition) equipment

Thermal ALD (Atomic Layer Deposition) equipment

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Thermal ALD equipment Savannah G2

last updated:Dec 28, 2022

ハイテック・システムズ
ハイテック・システムズ
  • Official site

ALD device. Compact and low-cost, achieving precise thickness with atomic-level deposition control!

High-Tech Systems is the sales agent for Veeco/CNT, a global leading company in ALD (Atomic Layer Deposition) equipment. Veeco/CNT is the ALD (Atomic Layer Deposition) division of the U.S. company Veeco, which develops advanced ALD technology and is the manufacturer of the most widely used development and pilot production ALD equipment in research institutions, universities, and companies around the world. They also have a proven track record in the market for production ALD equipment and large-area substrate ALD equipment, and they respond to customer requests.

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Thermal ALD (Atomic Layer Deposition) equipment

savannah-1.jpg
savannah-1.jpg
  • Related Link - https://www.hightec-sys.com/mems/veeco.html

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basic information

Hi-Tech Systems supports the introduction of products and technologies from Veeco/CNT, a global leading company in ALD atomic layer deposition equipment! ● High Precision - Layer deposition one at a time through digital control, achieving precise thickness - Film formation on ultra-high aspect ratio structures made possible by using exposure mode ● Low Cost - Cost performance that facilitates easy introduction - Equipped with ALD Vapor Trap. Residual precursors in the reaction chamber are deposited, ensuring clean exhaust. ● User-Friendly - New options added for even more diverse film deposition - LVPD (Low Vapor Pressure Precursor Delivery) system - SAMs (Self-Assembled Monolayers) - In-situ measurement (Ellipsometry, QCM) An easy-to-understand operating system using LabVIEW, with standard recipes provided. Please feel free to contact us for more details about this ALD equipment.

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Applications/Examples of results

ALD technology contributes to a wide range of fields such as semiconductors, flat panel displays (FPD), MEMS, lighting, and medical applications by forming thin films with excellent protective characteristics and no defects.

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Leading successful used equipment implementation with high technical expertise - Rebate Technology Services Company Profile

Leading successful used equipment implementation with high technical expertise - Rebate Technology Services Company Profile

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Engineering technology that connects advanced overseas systems with customer needs.

Engineering technology that connects advanced overseas systems with customer needs.

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Company information

ハイテック・システムズ

ハイテック・システムズ

Industrial Machinery

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Our company website features information on used equipment related to FPD and semiconductors. ● Main Business Activities Purchase of used semiconductor manufacturing equipment, refurbishment, sales, and setup operations Construction and consulting for semiconductor manufacturing lines Purchase of used FPD manufacturing equipment, refurbishment, sales, and setup operations Construction and consulting for FPD manufacturing lines Contract development, manufacturing, and sales of semiconductor manufacturing equipment and FPD manufacturing equipment Sales of various equipment parts Agency sales of overseas manufactured equipment

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