It demonstrates extremely high corrosion resistance and outstanding performance against halogen-based reactive corrosive special gases.
This is a ceramic gas filter manufactured by Pureon Japan, used in semiconductor manufacturing gas lines and other applications. The filter's structural components include Hastelloy C-22 for the filter housing and ceramics for the filter element. All of these materials exhibit very high corrosion resistance and outstanding performance against halogen-based reactive corrosive specialty gases such as HBr and HCl.
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basic information
【Features】 ○ The filtration precision is 0.003μm. ○ The recommended flow rate is 40 to 200 L/min. ○ The design pressure is 17 MPa (2,465 PSIG) at 20℃. ● For more details, please contact us or refer to the catalog.
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Applications/Examples of results
Applications and examples of achievements: semiconductor manufacturing gas lines, gas cabinets, semiconductor manufacturing equipment, etc.
Company information
PJ Corporation was established as the general sales agent for Pureon Japan Co., Ltd. PJ Corporation will do its utmost to promote Pureon products worldwide. Products handled: 1. All products from Pureon Japan Co., Ltd. - Ceramic gas filters - Metal gas filters - Hastelloy gas filters - PTFE gas filters - Hybrid filters - Gas purifiers - Heaters - Liquid filters - Pressure sensors - Display devices - Temperature sensors - Differential pressure gauges - Resistivity meters - Digital flow control systems 2. Fluid control equipment parts for semiconductor manufacturing equipment and general industrial machinery.
