It is suitable for use in primary bulk gas lines with a flow rate of 500 L/min to 3,000 L/min.
This is a ceramic gas filter manufactured by Pureon Japan, used in semiconductor manufacturing gas lines and other applications.
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basic information
【Features】 ○ The filtration precision is 0.003μm. ○ Usable fluids are N2, O2, and Ar (bulk gas). ○ Recommended flow rate is 500 to 3,000 L/min (60 to 180 m3/Hr). ● For more details, please contact us or refer to the catalog.
Price information
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Delivery Time
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Applications/Examples of results
Semiconductor manufacturing gas lines, gas cabinets, semiconductor manufacturing equipment, etc.
Company information
PJ Corporation was established as the general sales agent for Pureon Japan Co., Ltd. PJ Corporation will do its utmost to promote Pureon products worldwide. Products handled: 1. All products from Pureon Japan Co., Ltd. - Ceramic gas filters - Metal gas filters - Hastelloy gas filters - PTFE gas filters - Hybrid filters - Gas purifiers - Heaters - Liquid filters - Pressure sensors - Display devices - Temperature sensors - Differential pressure gauges - Resistivity meters - Digital flow control systems 2. Fluid control equipment parts for semiconductor manufacturing equipment and general industrial machinery.
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