Space-saving device integration with a compact body!
This is a constant temperature Pirani vacuum gauge that automatically adjusts the power supplied to keep the filament, which is deprived of heat, at a constant temperature. Its compact body allows for space-saving when integrated into equipment. The display is in an easy-to-use digital format.
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basic information
This is a Pirani vacuum gauge capable of measuring low vacuum in the range of (1.0×10^-1 Pa) to (1.0×10^4 Pa). It converts thermal conductivity into pressure for vacuum measurement. (Features) ● Measurement range of (1.0×10^-1 Pa) to (1.0×10^4 Pa) ● Robust against failures with a constant temperature type ● Compact body allows for space-saving (Specifications) - Output signal: a) Control output relay contact output capacity AC100V max, 1A max b) Analog output 0-5V F.S. (1V/1 digit) output impedance 1KΩ - Operating temperature and humidity: 5-40°C, up to 90% (no condensation) - Power supply PG-20: AC85-132V, 12VA or less (AC100V, 50/60Hz)
Price information
PG-20 (AC power supply): List price 130,000
Price range
P3
Delivery Time
P4
Applications/Examples of results
- Optical thin film deposition equipment - Acceleration devices and UHV research - Electronic device manufacturing equipment - Device manufacturing equipment for optoelectronics, etc.
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Company information
At Tokyo Electron Limited, we have developed a variety of vacuum gauges and control equipment that boast precision, reliability, and durability through our expertise in electronics and precision machinery. The concept of "vacuum" is a foundational technology for our lives and industries, impacting fields ranging from the IT industry to electronics, food and healthcare, as well as the development of new materials and the manufacturing of essential goods. Therefore, our business is centered on accurately and flexibly responding to the diverse demands of our clients across various fields. For the betterment of modern industry, tomorrow, and the future, we continue our activities today with the hope that our technology and products related to "vacuum" will become a "true sky" that spreads over people's happiness, just like a clear blue sky.
