This is a compact thermal cathode ionization vacuum gauge with an integrated sensor, circuit, and display. It supports 16 types of gases and also uses a metal sensor!
This is an "Ion Gauge Vacuum Meter" capable of high-precision measurements in a wide vacuum range from 1.33×10^-7 Pa to 6.65 Pa. The display uses a high-brightness, high-definition organic EL, providing high visibility, and allows for easy operation to call up and control various data. Additionally, it comes standard with a variety of interfaces. 【Features】 ■ Wide measurement range (1.33×10^-7 Pa to 6.65 Pa) ■ Easy setup ■ High visibility with organic EL display ■ Compatible with 16 types of gases ■ Standard equipped with two filaments (with protective function to prevent disconnection) *For more details, please refer to the PDF document or feel free to contact us.
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basic information
【Specifications】 ■Display: Digital display (3 digits for mantissa, 2 digits for exponent) ■Filament material: Yttria-coated iridium ■Degas: 4W Bombard method ■Gas type settings: FIL ON/OFF, Degas ON/OFF, Emission switch ■Analog output: 0-9VDC (log-linear): 1V/1 digit ■Operating temperature and humidity: 0-40℃, up to 95% (without condensation) ■Baking temperature: 200℃ (remove circuit section) ■Power supply: DC20-28V 14W ■Communication function (standard): RS-485 ■Set point: 1 point *For more details, please refer to the PDF document or feel free to contact us.
Price information
List price: 190,000
Price range
P3
Delivery Time
P4
Applications/Examples of results
【Applications】 ■ Vacuum deposition equipment ■ Optical film generation equipment ■ Acceleration devices and UHV research ■ Electronic device manufacturing equipment ■ Device manufacturing equipment for optoelectronics, etc.
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Company information
At Tokyo Electron Limited, we have developed a variety of vacuum gauges and control equipment that boast precision, reliability, and durability through our expertise in electronics and precision machinery. The concept of "vacuum" is a foundational technology for our lives and industries, impacting fields ranging from the IT industry to electronics, food and healthcare, as well as the development of new materials and the manufacturing of essential goods. Therefore, our business is centered on accurately and flexibly responding to the diverse demands of our clients across various fields. For the betterment of modern industry, tomorrow, and the future, we continue our activities today with the hope that our technology and products related to "vacuum" will become a "true sky" that spreads over people's happiness, just like a clear blue sky.