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  3. Manufacturing and processing machinery
  4. Semiconductor Manufacturing Equipment
  5. Evaporation Equipment
  6. Organic EL film formation device

Organic EL film formation device

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KVD-OLED Evo.3

last updated:Jul 30, 2012

北野精機
北野精機
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This is a research and development device equipped with an inline automatic control function for organic EL.

Eight organic vapor deposition cells (KOD-Cell) for organic materials (organic EL) are equipped, and a metal vapor deposition cell is standard for metal material deposition. Both the organic and metal cells are configured with a small-sized crucible to minimize chamber contamination within the device chamber. This system is fully automated, making it a multipurpose research and development device capable of conducting a wide variety of research.

    Organic ELEvaporation EquipmentOther clean room equipment and facilities
有機材料開発用成膜装置 KVD-OLED Evo.3.jpg

Organic EL film formation device

有機材料開発用成膜装置 KVD-OLED Evo.3.jpg
有機材料開発用成膜装置 KVD-OLED Evo.3.jpg

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basic information

【Features】 - Standard water-cooled jacket to prevent contamination between organic and metal materials. - Substrates and masks can be exchanged in a vacuum environment within the deposition chamber. - The gap between the substrate and the mask is minimized. - The substrate rotation mechanism ensures a film thickness distribution flatness within ±5% in the plane. - The organic deposition cell has excellent directionality, resulting in minimal material contamination within the deposition chamber. - Each processing chamber is treated with a special surface treatment, allowing for rapid achievement of the operating vacuum pressure. - Can be connected to a glove box. - The introduction chamber can stock a standard of 12 substrate and mask holders. - Automatic transport and automatic exhaust are possible with PLC control.

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Price range

P8

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Applications/Examples of results

[Applications] - Development of organic EL materials - Development of polymer materials - Development of phosphorescent materials - Development of organic thin-film solar cells - Development of organic electronic devices, etc.

catalog(2)

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Organic Device Comprehensive Catalog

Organic Device Comprehensive Catalog

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[Comprehensive Catalog] Vacuum Equipment and Parts

[Comprehensive Catalog] Vacuum Equipment and Parts

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Company information

北野精機

北野精機

Manufacturing and processing contract

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The history of Kitano Seiki is also a trajectory of continuous contribution to cutting-edge research fields through the provision of precision instruments for research and development. In November 1958, we were established as a company specializing in the design, manufacturing, and sales of precision instruments. Since then, we have developed and manufactured experimental equipment aimed at research institutes in universities and government agencies, as well as basic research laboratories in private companies, earning high praise for our excellent quality and reliability. In particular, in recent years, we have been at the forefront of ultra-high vacuum and ultra-low temperature technologies, which are essential in industrial fields such as new materials, nanotechnology, flat panel displays, high-temperature superconductivity, solar cells, nuclear power, and space development. We have accumulated abundant technology and know-how in creating experimental environments and have linked this to the development and provision of equipment that condenses advanced performance and functionality. At Kitano Seiki, we always work closely with researchers, our users, to design and develop equipment that accurately supports research and development objectives. With a consistent system from parts manufacturing to various processing, assembly, inspection and testing, equipment setup, and after-sales support, we provide high-quality products and a conducive experimental environment for quality research and development.

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